BE653469A - - Google Patents

Info

Publication number
BE653469A
BE653469A BE653469A BE653469A BE653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A
Authority
BE
Belgium
Application number
BE653469A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE653469A publication Critical patent/BE653469A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • H10W20/069Manufacture or treatment of conductive parts of the interconnections by forming self-aligned vias or self-aligned contact plugs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
BE653469A 1963-09-25 1964-09-23 BE653469A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL63298353A NL140655B (nl) 1963-09-25 1963-09-25 Werkwijze voor het naast elkaar aanbrengen van oppervlaktelagen op een drager, bij voorkeur voor de vervaardiging van een halfgeleiderinrichting.

Publications (1)

Publication Number Publication Date
BE653469A true BE653469A (https=) 1965-03-23

Family

ID=19755085

Family Applications (1)

Application Number Title Priority Date Filing Date
BE653469A BE653469A (https=) 1963-09-25 1964-09-23

Country Status (12)

Country Link
US (1) US3343254A (https=)
JP (1) JPS417175B1 (https=)
AT (1) AT250440B (https=)
BE (1) BE653469A (https=)
CH (1) CH454565A (https=)
DE (1) DE1298832B (https=)
DK (1) DK113658B (https=)
ES (1) ES304286A1 (https=)
FR (1) FR1408613A (https=)
GB (1) GB1078866A (https=)
NL (2) NL140655B (https=)
SE (1) SE317448B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209914A (en) * 1967-03-29 1970-10-21 Marconi Co Ltd Improvements in or relating to semi-conductor devices
US4017890A (en) * 1975-10-24 1977-04-12 International Business Machines Corporation Intermetallic compound layer in thin films for improved electromigration resistance
JPS5636166A (en) * 1979-08-31 1981-04-09 Toshiba Corp Nonvolatile semiconductor memory

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2911539A (en) * 1957-12-18 1959-11-03 Bell Telephone Labor Inc Photocell array
US3215570A (en) * 1963-03-15 1965-11-02 Texas Instruments Inc Method for manufacture of semiconductor devices

Also Published As

Publication number Publication date
ES304286A1 (es) 1965-03-16
JPS417175B1 (https=) 1966-04-20
AT250440B (de) 1966-11-10
NL298353A (https=)
SE317448B (https=) 1969-11-17
US3343254A (en) 1967-09-26
FR1408613A (fr) 1965-08-13
NL140655B (nl) 1973-12-17
DK113658B (da) 1969-04-14
CH454565A (de) 1968-04-15
GB1078866A (en) 1967-08-09
DE1298832B (de) 1969-07-03

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