BE653469A - - Google Patents

Info

Publication number
BE653469A
BE653469A BE653469A BE653469A BE653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A BE 653469 A BE653469 A BE 653469A
Authority
BE
Belgium
Application number
BE653469A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE653469A publication Critical patent/BE653469A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Conductive Materials (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Laminated Bodies (AREA)
BE653469A 1963-09-25 1964-09-23 BE653469A (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL63298353A NL140655B (nl) 1963-09-25 1963-09-25 Werkwijze voor het naast elkaar aanbrengen van oppervlaktelagen op een drager, bij voorkeur voor de vervaardiging van een halfgeleiderinrichting.

Publications (1)

Publication Number Publication Date
BE653469A true BE653469A (en:Method) 1965-03-23

Family

ID=19755085

Family Applications (1)

Application Number Title Priority Date Filing Date
BE653469A BE653469A (en:Method) 1963-09-25 1964-09-23

Country Status (12)

Country Link
US (1) US3343254A (en:Method)
JP (1) JPS417175B1 (en:Method)
AT (1) AT250440B (en:Method)
BE (1) BE653469A (en:Method)
CH (1) CH454565A (en:Method)
DE (1) DE1298832B (en:Method)
DK (1) DK113658B (en:Method)
ES (1) ES304286A1 (en:Method)
FR (1) FR1408613A (en:Method)
GB (1) GB1078866A (en:Method)
NL (2) NL140655B (en:Method)
SE (1) SE317448B (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209914A (en) * 1967-03-29 1970-10-21 Marconi Co Ltd Improvements in or relating to semi-conductor devices
US4017890A (en) * 1975-10-24 1977-04-12 International Business Machines Corporation Intermetallic compound layer in thin films for improved electromigration resistance
JPS5636166A (en) * 1979-08-31 1981-04-09 Toshiba Corp Nonvolatile semiconductor memory

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2911539A (en) * 1957-12-18 1959-11-03 Bell Telephone Labor Inc Photocell array
US3215570A (en) * 1963-03-15 1965-11-02 Texas Instruments Inc Method for manufacture of semiconductor devices

Also Published As

Publication number Publication date
DK113658B (da) 1969-04-14
GB1078866A (en) 1967-08-09
CH454565A (de) 1968-04-15
NL298353A (en:Method)
DE1298832B (de) 1969-07-03
AT250440B (de) 1966-11-10
JPS417175B1 (en:Method) 1966-04-20
FR1408613A (fr) 1965-08-13
US3343254A (en) 1967-09-26
NL140655B (nl) 1973-12-17
SE317448B (en:Method) 1969-11-17
ES304286A1 (es) 1965-03-16

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