BE629139A - - Google Patents
Info
- Publication number
- BE629139A BE629139A BE629139DA BE629139A BE 629139 A BE629139 A BE 629139A BE 629139D A BE629139D A BE 629139DA BE 629139 A BE629139 A BE 629139A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES78347A DE1215665B (de) | 1962-03-06 | 1962-03-06 | Verfahren zum Herstellen von hochreinem Siliziumkarbid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE629139A true BE629139A (ru) |
Family
ID=7507399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE629139D BE629139A (ru) | 1962-03-06 |
Country Status (3)
| Country | Link |
|---|---|
| BE (1) | BE629139A (ru) |
| DE (1) | DE1215665B (ru) |
| GB (1) | GB1029473A (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1228235B (de) * | 1964-03-02 | 1966-11-10 | Siemens Ag | Verfahren zum Herstellen einkristalliner Staebe aus Siliciumcarbid |
| DE1236482B (de) * | 1964-03-02 | 1967-03-16 | Siemens Ag | Verfahren zum Herstellen einkristalliner Schichten aus vorzugsweise hexagonalem Siliciumkarbid |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106044774B (zh) * | 2016-05-31 | 2018-02-27 | 上海纳晶科技有限公司 | 一种低温低成本高纯碳化硅超细微粒的制备方法 |
| KR102525767B1 (ko) | 2021-11-11 | 2023-04-27 | 오씨아이 주식회사 | 고순도 SiC 결정체의 제조방법 |
-
0
- BE BE629139D patent/BE629139A/xx unknown
-
1962
- 1962-03-06 DE DES78347A patent/DE1215665B/de active Pending
-
1963
- 1963-02-28 GB GB8164/63A patent/GB1029473A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1228235B (de) * | 1964-03-02 | 1966-11-10 | Siemens Ag | Verfahren zum Herstellen einkristalliner Staebe aus Siliciumcarbid |
| DE1236482B (de) * | 1964-03-02 | 1967-03-16 | Siemens Ag | Verfahren zum Herstellen einkristalliner Schichten aus vorzugsweise hexagonalem Siliciumkarbid |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1029473A (en) | 1966-05-11 |
| DE1215665B (de) | 1966-05-05 |