BE629139A - - Google Patents

Info

Publication number
BE629139A
BE629139A BE629139DA BE629139A BE 629139 A BE629139 A BE 629139A BE 629139D A BE629139D A BE 629139DA BE 629139 A BE629139 A BE 629139A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE629139A publication Critical patent/BE629139A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
BE629139D 1962-03-06 BE629139A (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES78347A DE1215665B (de) 1962-03-06 1962-03-06 Verfahren zum Herstellen von hochreinem Siliziumkarbid

Publications (1)

Publication Number Publication Date
BE629139A true BE629139A (en:Method)

Family

ID=7507399

Family Applications (1)

Application Number Title Priority Date Filing Date
BE629139D BE629139A (en:Method) 1962-03-06

Country Status (3)

Country Link
BE (1) BE629139A (en:Method)
DE (1) DE1215665B (en:Method)
GB (1) GB1029473A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1228235B (de) * 1964-03-02 1966-11-10 Siemens Ag Verfahren zum Herstellen einkristalliner Staebe aus Siliciumcarbid
DE1236482B (de) * 1964-03-02 1967-03-16 Siemens Ag Verfahren zum Herstellen einkristalliner Schichten aus vorzugsweise hexagonalem Siliciumkarbid

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106044774B (zh) * 2016-05-31 2018-02-27 上海纳晶科技有限公司 一种低温低成本高纯碳化硅超细微粒的制备方法
KR102525767B1 (ko) * 2021-11-11 2023-04-27 오씨아이 주식회사 고순도 SiC 결정체의 제조방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1228235B (de) * 1964-03-02 1966-11-10 Siemens Ag Verfahren zum Herstellen einkristalliner Staebe aus Siliciumcarbid
DE1236482B (de) * 1964-03-02 1967-03-16 Siemens Ag Verfahren zum Herstellen einkristalliner Schichten aus vorzugsweise hexagonalem Siliciumkarbid

Also Published As

Publication number Publication date
DE1215665B (de) 1966-05-05
GB1029473A (en) 1966-05-11

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