BE607003A - Procédé de diffusion - Google Patents

Procédé de diffusion

Info

Publication number
BE607003A
BE607003A BE607003A BE607003A BE607003A BE 607003 A BE607003 A BE 607003A BE 607003 A BE607003 A BE 607003A BE 607003 A BE607003 A BE 607003A BE 607003 A BE607003 A BE 607003A
Authority
BE
Belgium
Prior art keywords
diffusion process
diffusion
Prior art date
Application number
BE607003A
Other languages
English (en)
Inventor
James O Mccaldin
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of BE607003A publication Critical patent/BE607003A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
BE607003A 1960-11-22 1961-08-08 Procédé de diffusion BE607003A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7095160A 1960-11-22 1960-11-22

Publications (1)

Publication Number Publication Date
BE607003A true BE607003A (fr) 1961-12-01

Family

ID=22098349

Family Applications (1)

Application Number Title Priority Date Filing Date
BE607003A BE607003A (fr) 1960-11-22 1961-08-08 Procédé de diffusion

Country Status (4)

Country Link
BE (1) BE607003A (fr)
DE (1) DE1214788B (fr)
GB (1) GB936815A (fr)
NL (1) NL268470A (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL100917C (fr) * 1955-11-05
DE1090771B (de) * 1956-01-20 1960-10-13 S E A Soc D Electronique Et D Verfahren zur Herstellung von Halbleiteranordnungen mit duennen Einkristallschichten auf einem metallisch leitenden Traeger
DE1084840B (de) * 1957-01-23 1960-07-07 Intermetall Verfahren zur Herstellung von kugelfoermigen Halbleiterkoerpern aus Silizium von Halbleiteranordnungen, z. B. Spitzen-Gleichrichtern oder Spitzen-Transistoren
DE1086515B (de) * 1958-01-15 1960-08-04 Hivolin G M B H Verfahren und Vorrichtung zur gleichwirkenden inneren Behandlung von Hohlkoerpersystemen mit Fluessig-keiten, z. B. zum Ausbeizen von Kesselanlagen

Also Published As

Publication number Publication date
GB936815A (en) 1963-09-11
DE1214788B (de) 1966-04-21
NL268470A (fr)

Similar Documents

Publication Publication Date Title
FR1271252A (fr) Procédé de pyrohydrolyse
FR1307719A (fr) Procédé de polymérisation des nu-vinyllactames
FR1298839A (fr) Procédé de renvidage
BE612173A (fr) Procédé de polymérisation
FR1297641A (fr) Procédé de préfilage
FR1216105A (fr) Procédé de construction
BE607003A (fr) Procédé de diffusion
FR1312185A (fr) Procédé de déhydrohalogénation de fluorochloroalcanes
FR1296342A (fr) Procédé photoconductolithographique
FR1260608A (fr) Procédé de polymérisation des alcoxypropènes
FR1245249A (fr) Procédé de filage de métaux
BE609143A (fr) Procédé de fermentation
FR1272220A (fr) Procédé de soudage
FR1284090A (fr) Procédé de construction
BE609067A (fr) Procédé de teinture
BE608631A (fr) Procédé de teinture
BE602790A (fr) Procédé de teinture
FR1251651A (fr) Procédé de construction de bâtiments
FR1256541A (fr) Procédé de nitruration
FR1330140A (fr) Procédé de polymérisation en solution
FR1213808A (fr) Procédé de construction
FR1284724A (fr) Procédé électrophotographique
FR1288724A (fr) Procédé de nitration de la méthyl-2-furyl-cétone
FR1318333A (fr) Procédé de développement inversé
FR1324234A (fr) Procédé de photopolymérisation