BE551462A - - Google Patents

Info

Publication number
BE551462A
BE551462A BE551462DA BE551462A BE 551462 A BE551462 A BE 551462A BE 551462D A BE551462D A BE 551462DA BE 551462 A BE551462 A BE 551462A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE551462A publication Critical patent/BE551462A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
BE551462D 1955-10-04 BE551462A (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL345397X 1955-10-04

Publications (1)

Publication Number Publication Date
BE551462A true BE551462A (en:Method)

Family

ID=19784879

Family Applications (1)

Application Number Title Priority Date Filing Date
BE551462D BE551462A (en:Method) 1955-10-04

Country Status (7)

Country Link
US (1) US2910603A (en:Method)
BE (1) BE551462A (en:Method)
CH (1) CH345397A (en:Method)
DE (1) DE1089089B (en:Method)
FR (1) FR1171295A (en:Method)
GB (1) GB833249A (en:Method)
NL (2) NL200957A (en:Method)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL242894A (en:Method) * 1958-09-06
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
US3021445A (en) * 1959-07-24 1962-02-13 Bbc Brown Boveri & Cie Electron lens
US3253144A (en) * 1963-05-27 1966-05-24 Tektronix Inc Electron lens having means for correcting astigmatism
US3322950A (en) * 1964-09-01 1967-05-30 Varian Associates Linear accelerator radiotherapy device and associated beam defining structure
JPS58123648A (ja) * 1982-01-18 1983-07-22 Hitachi Ltd 電磁レンズポ−ルピ−ス構造体
US7995443B2 (en) * 2007-07-30 2011-08-09 International Business Machines Corporation Apparatus and method to store information in a holographic data storage medium
JP6219741B2 (ja) * 2014-02-13 2017-10-25 日本電子株式会社 多極子レンズの製造方法、多極子レンズ、および荷電粒子線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL54829C (en:Method) * 1936-09-11
DE973258C (de) * 1938-03-08 1959-12-31 Siemens Ag Magnetische Polschuhlinse kleiner Brennweite fuer elektronenoptische Vergroesserungen in Elektronenmikroskopen
US2568456A (en) * 1949-12-06 1951-09-18 Gen Electric Electromagnetic deflection yoke structure
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2608665A (en) * 1950-07-29 1952-08-26 Gen Electric Permanent magnet focusing device
NL94737C (en:Method) * 1950-08-29
NL194113A (en:Method) * 1954-01-22

Also Published As

Publication number Publication date
NL100357C (en:Method)
GB833249A (en) 1960-04-21
DE1089089B (de) 1960-09-15
CH345397A (de) 1960-03-31
FR1171295A (fr) 1959-01-23
NL200957A (en:Method)
US2910603A (en) 1959-10-27

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