BE477595A - - Google Patents

Info

Publication number
BE477595A
BE477595A BE477595DA BE477595A BE 477595 A BE477595 A BE 477595A BE 477595D A BE477595D A BE 477595DA BE 477595 A BE477595 A BE 477595A
Authority
BE
Belgium
Prior art keywords
gas stream
silicon
silica
gas
silicon fluoride
Prior art date
Application number
Other languages
English (en)
French (fr)
Publication of BE477595A publication Critical patent/BE477595A/fr

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C01B33/181Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
    • C01B33/183Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
    • C01B33/184Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane by hydrolysis of tetrafluoride
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
BE477595D BE477595A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE482300T

Publications (1)

Publication Number Publication Date
BE477595A true BE477595A (es)

Family

ID=3870414

Family Applications (2)

Application Number Title Priority Date Filing Date
BE477595D BE477595A (es)
BE482300D BE482300A (es)

Family Applications After (1)

Application Number Title Priority Date Filing Date
BE482300D BE482300A (es)

Country Status (1)

Country Link
BE (2) BE482300A (es)

Also Published As

Publication number Publication date
BE482300A (es)

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