BE435960A - - Google Patents

Info

Publication number

BE435960A

BE435960A BE435960DA BE435960A BE 435960 A BE435960 A BE 435960A BE 435960D A BE435960D A BE 435960DA BE 435960 A BE435960 A BE 435960A

Authority

BE

Belgium

Prior art keywords

chamber

chambers

water

deposition

air

Prior art date

Links

• Espacenet
• Global Dossier
• Discuss

• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 40
• 230000008021 deposition Effects 0.000 claims description 27
• 238000004140 cleaning Methods 0.000 claims description 14
• 239000000463 material Substances 0.000 claims description 10
• 238000005192 partition Methods 0.000 claims description 10
• 238000009825 accumulation Methods 0.000 claims description 6
• 230000015271 coagulation Effects 0.000 claims description 3
• 238000005345 coagulation Methods 0.000 claims description 3
• 239000000126 substance Substances 0.000 claims description 3
• 239000007788 liquid Substances 0.000 claims description 2
• 238000007599 discharging Methods 0.000 claims 1
• 238000009434 installation Methods 0.000 description 8
• 239000008213 purified water Substances 0.000 description 6
• 238000010926 purge Methods 0.000 description 3
• 230000001105 regulatory effect Effects 0.000 description 2
• 239000011449 brick Substances 0.000 description 1
• 229910010293 ceramic material Inorganic materials 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000000543 intermediate Substances 0.000 description 1
• 230000000149 penetrating effect Effects 0.000 description 1
• 238000000746 purification Methods 0.000 description 1