BE419966A - - Google Patents
Info
- Publication number
- BE419966A BE419966A BE419966DA BE419966A BE 419966 A BE419966 A BE 419966A BE 419966D A BE419966D A BE 419966DA BE 419966 A BE419966 A BE 419966A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3421—Cathode assembly for sputtering apparatus, e.g. Target using heated targets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microwave Tubes (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEB173069D DE737613C (de) | 1936-02-21 | 1936-02-21 | Verfahren zur Metallisierung durch Kathodenzerstaeubung mittels durch Stromdurchgang erhitzter gestreckter Kathoden |
| DE470614X | 1936-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE419966A true BE419966A (en:Method) |
Family
ID=32327363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE419966D BE419966A (en:Method) | 1936-02-21 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE419966A (en:Method) |
| DE (1) | DE737613C (en:Method) |
| FR (1) | FR817807A (en:Method) |
| GB (1) | GB470614A (en:Method) |
-
0
- BE BE419966D patent/BE419966A/xx unknown
-
1936
- 1936-02-21 DE DEB173069D patent/DE737613C/de not_active Expired
-
1937
- 1937-02-12 FR FR817807D patent/FR817807A/fr not_active Expired
- 1937-02-13 GB GB438437A patent/GB470614A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE737613C (de) | 1943-07-17 |
| FR817807A (fr) | 1937-09-11 |
| GB470614A (en) | 1937-08-18 |