AU9027398A - Focusing and autofocusing in scanning laser imaging - Google Patents

Focusing and autofocusing in scanning laser imaging

Info

Publication number
AU9027398A
AU9027398A AU90273/98A AU9027398A AU9027398A AU 9027398 A AU9027398 A AU 9027398A AU 90273/98 A AU90273/98 A AU 90273/98A AU 9027398 A AU9027398 A AU 9027398A AU 9027398 A AU9027398 A AU 9027398A
Authority
AU
Australia
Prior art keywords
autofocusing
focusing
scanning laser
laser imaging
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU90273/98A
Inventor
L. David Tomei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LXR Biotechnology Inc
Original Assignee
LXR Biotechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LXR Biotechnology Inc filed Critical LXR Biotechnology Inc
Publication of AU9027398A publication Critical patent/AU9027398A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70641—Focus
AU90273/98A 1997-08-22 1998-08-20 Focusing and autofocusing in scanning laser imaging Abandoned AU9027398A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5681097P 1997-08-22 1997-08-22
US60056810 1997-08-22
PCT/US1998/017259 WO1999010771A1 (en) 1997-08-22 1998-08-20 Focusing and autofocusing in scanning laser imaging

Publications (1)

Publication Number Publication Date
AU9027398A true AU9027398A (en) 1999-03-16

Family

ID=22006699

Family Applications (1)

Application Number Title Priority Date Filing Date
AU90273/98A Abandoned AU9027398A (en) 1997-08-22 1998-08-20 Focusing and autofocusing in scanning laser imaging

Country Status (2)

Country Link
AU (1) AU9027398A (en)
WO (1) WO1999010771A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4000417A (en) * 1975-08-25 1976-12-28 Honeywell Inc. Scanning microscope system with automatic cell find and autofocus
JPS597321A (en) * 1982-07-02 1984-01-14 Nippon Kogaku Kk <Nikon> Highly accurate detector for out of focus
US4677286A (en) * 1985-02-14 1987-06-30 Quantronix Corporation Method and apparatus for autofocusing a microscope
US5037207A (en) * 1986-02-12 1991-08-06 Ohio State University Research Foundation Laser imaging system
US4965725B1 (en) * 1988-04-08 1996-05-07 Neuromedical Systems Inc Neural network based automated cytological specimen classification system and method

Also Published As

Publication number Publication date
WO1999010771A1 (en) 1999-03-04

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase