AU7137300A - Collimator and focusing optic - Google Patents

Collimator and focusing optic

Info

Publication number
AU7137300A
AU7137300A AU71373/00A AU7137300A AU7137300A AU 7137300 A AU7137300 A AU 7137300A AU 71373/00 A AU71373/00 A AU 71373/00A AU 7137300 A AU7137300 A AU 7137300A AU 7137300 A AU7137300 A AU 7137300A
Authority
AU
Australia
Prior art keywords
collimator
focusing optic
optic
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU71373/00A
Inventor
Troy W. Barbee Jr.
Richard M. Foster
Stephen M Lane
I. C. Edmond Turcu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
JMAR Research Inc
Original Assignee
University of California
JMAR Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California, JMAR Research Inc filed Critical University of California
Publication of AU7137300A publication Critical patent/AU7137300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70166—Capillary or channel elements, e.g. nested extreme ultraviolet [EUV] mirrors or shells, optical fibers or light guides
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Nanotechnology (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Microscoopes, Condenser (AREA)
AU71373/00A 1999-07-21 2000-07-21 Collimator and focusing optic Abandoned AU7137300A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US14548999P 1999-07-21 1999-07-21
US60145489 1999-07-21
US20943800P 2000-06-08 2000-06-08
US60209438 2000-06-08
PCT/US2000/040443 WO2001007939A1 (en) 1999-07-21 2000-07-21 Collimator and focusing optic

Publications (1)

Publication Number Publication Date
AU7137300A true AU7137300A (en) 2001-02-13

Family

ID=26843033

Family Applications (1)

Application Number Title Priority Date Filing Date
AU71373/00A Abandoned AU7137300A (en) 1999-07-21 2000-07-21 Collimator and focusing optic

Country Status (4)

Country Link
EP (1) EP1204888A1 (en)
JP (1) JP2003528333A (en)
AU (1) AU7137300A (en)
WO (1) WO2001007939A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2187160C1 (en) * 2000-12-29 2002-08-10 Кумахов Мурадин Абубекирович X-ray lithographer
JP3618090B2 (en) 2001-10-23 2005-02-09 株式会社ニレコ Collimator and spectrophotometer
US7034320B2 (en) 2003-03-20 2006-04-25 Intel Corporation Dual hemispherical collectors
JP2006126045A (en) * 2004-10-29 2006-05-18 Rigaku Industrial Co Poly-capillary
US7443959B2 (en) * 2006-10-10 2008-10-28 Oxford Instruments Analytical Oy Selective irradiation of small target area in X-ray fluorescent spectroscopy
CN103125010A (en) * 2010-05-19 2013-05-29 埃里克·H·西尔弗 Hybrid X-ray optic apparatus and methods
CN106371293A (en) * 2016-11-08 2017-02-01 东莞市北科电子科技有限公司 Mechanism capable of improving parallel light ejection of LED exposure machine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947687A (en) * 1974-10-23 1976-03-30 The United States Of America As Represented By The Secretary Of The Air Force Collimated x-ray source for x-ray lithographic system
DE2926883A1 (en) * 1979-07-03 1981-01-22 Siemens Ag ELECTRONIC ACCELERATOR
EP0723272B1 (en) * 1994-07-08 2001-04-25 Muradin Abubekirovich Kumakhov Method of guiding beams of neutral and charged particles and a device for implementing said method
US5682415A (en) * 1995-10-13 1997-10-28 O'hara; David B. Collimator for x-ray spectroscopy

Also Published As

Publication number Publication date
EP1204888A1 (en) 2002-05-15
WO2001007939A1 (en) 2001-02-01
JP2003528333A (en) 2003-09-24

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase