AU687960B2 - Solid state micro-machined mass spectrograph universal gas detection sensor - Google Patents
Solid state micro-machined mass spectrograph universal gas detection sensor Download PDFInfo
- Publication number
- AU687960B2 AU687960B2 AU12591/95A AU1259195A AU687960B2 AU 687960 B2 AU687960 B2 AU 687960B2 AU 12591/95 A AU12591/95 A AU 12591/95A AU 1259195 A AU1259195 A AU 1259195A AU 687960 B2 AU687960 B2 AU 687960B2
- Authority
- AU
- Australia
- Prior art keywords
- cavity
- mass
- gas
- section
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000007787 solid Substances 0.000 title claims description 18
- 238000001514 detection method Methods 0.000 title description 7
- 239000000758 substrate Substances 0.000 claims description 42
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000470 constituent Substances 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 12
- 239000006185 dispersion Substances 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims description 4
- 230000005672 electromagnetic field Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 32
- 239000003990 capacitor Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 239000007943 implant Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- IZJSTXINDUKPRP-UHFFFAOYSA-N aluminum lead Chemical compound [Al].[Pb] IZJSTXINDUKPRP-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000451 chemical ionisation Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
- H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
- H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1994/013509 WO1996016430A1 (en) | 1993-09-22 | 1994-11-22 | Solid state micro-machined mass spectrograph universal gas detection sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU1259195A AU1259195A (en) | 1996-06-17 |
| AU687960B2 true AU687960B2 (en) | 1998-03-05 |
Family
ID=22243314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU12591/95A Ceased AU687960B2 (en) | 1994-11-22 | 1994-11-22 | Solid state micro-machined mass spectrograph universal gas detection sensor |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0745268B1 (de) |
| JP (1) | JPH09511614A (de) |
| KR (1) | KR970700931A (de) |
| AU (1) | AU687960B2 (de) |
| DE (1) | DE69414136D1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019178649A1 (en) * | 2018-03-23 | 2019-09-26 | ETP Ion Detect Pty Ltd | Particle detector having improved performance and service life |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2438892A (en) * | 2006-06-08 | 2007-12-12 | Microsaic Systems Ltd | Microengineered vacuum interface for an electrospray ionization system |
| EP1959476A1 (de) * | 2007-02-19 | 2008-08-20 | Technische Universität Hamburg-Harburg | Massenspektrometer |
| CN107180740A (zh) * | 2017-04-26 | 2017-09-19 | 上海交通大学 | 提高空间分辨率的二维角分辨质子谱仪 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5304799A (en) * | 1992-07-17 | 1994-04-19 | Monitor Group, Inc. | Cycloidal mass spectrometer and ionizer for use therein |
| US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
| WO1995012894A2 (en) * | 1993-11-01 | 1995-05-11 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
-
1994
- 1994-11-22 JP JP8516795A patent/JPH09511614A/ja active Pending
- 1994-11-22 DE DE69414136T patent/DE69414136D1/de not_active Expired - Lifetime
- 1994-11-22 EP EP95903590A patent/EP0745268B1/de not_active Expired - Lifetime
- 1994-11-22 AU AU12591/95A patent/AU687960B2/en not_active Ceased
-
1996
- 1996-07-22 KR KR1019960703946A patent/KR970700931A/ko not_active Application Discontinuation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5304799A (en) * | 1992-07-17 | 1994-04-19 | Monitor Group, Inc. | Cycloidal mass spectrometer and ionizer for use therein |
| US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
| WO1995012894A2 (en) * | 1993-11-01 | 1995-05-11 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019178649A1 (en) * | 2018-03-23 | 2019-09-26 | ETP Ion Detect Pty Ltd | Particle detector having improved performance and service life |
| US11848180B2 (en) | 2018-03-23 | 2023-12-19 | Adaptas Solutions Pty Ltd | Particle detector having improved performance and service life |
Also Published As
| Publication number | Publication date |
|---|---|
| KR970700931A (ko) | 1997-02-12 |
| EP0745268B1 (de) | 1998-10-21 |
| AU1259195A (en) | 1996-06-17 |
| EP0745268A1 (de) | 1996-12-04 |
| JPH09511614A (ja) | 1997-11-18 |
| DE69414136D1 (de) | 1998-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |