AU6775774A - Improvements relating to reactive sputtering apparatus and cathode elements therefor - Google Patents

Improvements relating to reactive sputtering apparatus and cathode elements therefor

Info

Publication number
AU6775774A
AU6775774A AU67757/74A AU6775774A AU6775774A AU 6775774 A AU6775774 A AU 6775774A AU 67757/74 A AU67757/74 A AU 67757/74A AU 6775774 A AU6775774 A AU 6775774A AU 6775774 A AU6775774 A AU 6775774A
Authority
AU
Australia
Prior art keywords
sputtering apparatus
reactive sputtering
improvements relating
cathode elements
elements therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU67757/74A
Other versions
AU482170B2 (en
Inventor
Burrows Kenneth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington Automotive Ltd
Original Assignee
Triplex Safety Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triplex Safety Glass Co filed Critical Triplex Safety Glass Co
Application granted granted Critical
Publication of AU482170B2 publication Critical patent/AU482170B2/en
Publication of AU6775774A publication Critical patent/AU6775774A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
AU67757/74A 1973-04-27 1974-04-10 Improvements relating to reactive sputtering apparatus and cathode elements therefor Expired AU482170B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2018473A GB1443827A (en) 1973-04-27 1973-04-27 Reactive sputtering apparatus and cathode units therefor
GBGB20184/73 1973-04-27

Publications (2)

Publication Number Publication Date
AU482170B2 AU482170B2 (en) 1975-10-16
AU6775774A true AU6775774A (en) 1975-10-16

Family

ID=

Also Published As

Publication number Publication date
FR2227345A1 (en) 1974-11-22
GB1443827A (en) 1976-07-28
BE814286A (en) 1974-10-28
FR2227345B1 (en) 1977-10-14
ZA742375B (en) 1975-11-26
CH590936A5 (en) 1977-08-31
SE408913B (en) 1979-07-16
NL7404891A (en) 1974-10-29
SU764619A3 (en) 1980-09-15
JPS539594B2 (en) 1978-04-06
DE2418008A1 (en) 1974-11-21
US3890217A (en) 1975-06-17
IT1010755B (en) 1977-01-20
JPS5013275A (en) 1975-02-12
CA1024937A (en) 1978-01-24

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