AU6064273A - Buried channel charge coupled devices - Google Patents

Buried channel charge coupled devices

Info

Publication number
AU6064273A
AU6064273A AU60642/73A AU6064273A AU6064273A AU 6064273 A AU6064273 A AU 6064273A AU 60642/73 A AU60642/73 A AU 60642/73A AU 6064273 A AU6064273 A AU 6064273A AU 6064273 A AU6064273 A AU 6064273A
Authority
AU
Australia
Prior art keywords
charge coupled
coupled devices
buried channel
channel charge
buried
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU60642/73A
Other languages
English (en)
Inventor
George Bechtel James Michael Early Norbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Publication of AU6064273A publication Critical patent/AU6064273A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D44/00—Charge transfer devices
    • H10D44/40—Charge-coupled devices [CCD]
    • H10D44/45—Charge-coupled devices [CCD] having field effect produced by insulated gate electrodes 
    • H10D44/462—Buried-channel CCD
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/661—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/671—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor having lateral variation in doping or structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
AU60642/73A 1972-10-10 1973-09-24 Buried channel charge coupled devices Expired AU6064273A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29650772A 1972-10-10 1972-10-10
USUS296,507 1972-10-10

Publications (1)

Publication Number Publication Date
AU6064273A true AU6064273A (en) 1975-03-27

Family

ID=23142298

Family Applications (1)

Application Number Title Priority Date Filing Date
AU60642/73A Expired AU6064273A (en) 1972-10-10 1973-09-24 Buried channel charge coupled devices

Country Status (5)

Country Link
AU (1) AU6064273A (enrdf_load_html_response)
DD (1) DD107546A5 (enrdf_load_html_response)
DE (1) DE2349618A1 (enrdf_load_html_response)
FR (1) FR2202370A1 (enrdf_load_html_response)
IT (1) IT996773B (enrdf_load_html_response)

Also Published As

Publication number Publication date
DE2349618A1 (de) 1974-04-18
DD107546A5 (enrdf_load_html_response) 1974-08-05
IT996773B (it) 1975-12-10
FR2202370A1 (enrdf_load_html_response) 1974-05-03

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