AU5901100A - Micro-electromechanical devices and methods of manufacture - Google Patents
Micro-electromechanical devices and methods of manufactureInfo
- Publication number
- AU5901100A AU5901100A AU59011/00A AU5901100A AU5901100A AU 5901100 A AU5901100 A AU 5901100A AU 59011/00 A AU59011/00 A AU 59011/00A AU 5901100 A AU5901100 A AU 5901100A AU 5901100 A AU5901100 A AU 5901100A
- Authority
- AU
- Australia
- Prior art keywords
- micro
- manufacture
- methods
- electromechanical devices
- electromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14141399P | 1999-06-29 | 1999-06-29 | |
US60141413 | 1999-06-29 | ||
PCT/US2000/017988 WO2001000523A1 (en) | 1999-06-29 | 2000-06-29 | Micro-electromechanical devices and methods of manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
AU5901100A true AU5901100A (en) | 2001-01-31 |
Family
ID=22495586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU59011/00A Abandoned AU5901100A (en) | 1999-06-29 | 2000-06-29 | Micro-electromechanical devices and methods of manufacture |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1196349A1 (en) |
AU (1) | AU5901100A (en) |
CA (1) | CA2377189A1 (en) |
WO (1) | WO2001000523A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6816301B1 (en) | 1999-06-29 | 2004-11-09 | Regents Of The University Of Minnesota | Micro-electromechanical devices and methods of manufacture |
WO2002066995A1 (en) * | 2001-02-23 | 2002-08-29 | Water Corporation | Vibration measurement apparatus |
GB2383546B (en) * | 2001-12-28 | 2006-03-01 | Norchip As | Fluid manipulation in a microfabricated reaction chamber system |
US7867757B2 (en) | 2001-12-28 | 2011-01-11 | Norchip As | Fluid manipulation in a microfabricated reaction chamber systems |
DE10320357B4 (en) * | 2003-05-07 | 2010-05-12 | Perkinelmer Optoelectronics Gmbh & Co.Kg | Radiation sensor, wafer, sensor array and sensor module |
US7181281B1 (en) | 2003-10-08 | 2007-02-20 | Pacesetter, Inc. | ICD using MEMS for optimal therapy |
GB2453104B (en) * | 2007-09-19 | 2012-04-25 | Wolfson Microelectronics Plc | Mems device and process |
GB2452941B (en) * | 2007-09-19 | 2012-04-11 | Wolfson Microelectronics Plc | Mems device and process |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4784721A (en) * | 1988-02-22 | 1988-11-15 | Honeywell Inc. | Integrated thin-film diaphragm; backside etch |
JPH0233974A (en) * | 1988-07-22 | 1990-02-05 | Mitsubishi Electric Corp | Manufacture of pressure converter |
US5209119A (en) * | 1990-12-12 | 1993-05-11 | Regents Of The University Of Minnesota | Microdevice for sensing a force |
DE4227819C2 (en) * | 1991-08-22 | 1996-10-17 | Yamatake Honeywell Co Ltd | Capacitive pressure sensor |
US5332469A (en) * | 1992-11-12 | 1994-07-26 | Ford Motor Company | Capacitive surface micromachined differential pressure sensor |
JPH08236784A (en) * | 1995-02-23 | 1996-09-13 | Tokai Rika Co Ltd | Acceleration sensor and manufacture thereof |
JP3536516B2 (en) * | 1996-02-28 | 2004-06-14 | 株式会社ニコン | Method of forming floating structure |
-
2000
- 2000-06-29 EP EP00945011A patent/EP1196349A1/en not_active Withdrawn
- 2000-06-29 CA CA002377189A patent/CA2377189A1/en not_active Abandoned
- 2000-06-29 WO PCT/US2000/017988 patent/WO2001000523A1/en not_active Application Discontinuation
- 2000-06-29 AU AU59011/00A patent/AU5901100A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2001000523A1 (en) | 2001-01-04 |
EP1196349A1 (en) | 2002-04-17 |
CA2377189A1 (en) | 2001-01-04 |
WO2001000523A9 (en) | 2002-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |