AU5772369A - A method for alloying metals to substrates such as semiconductor wafers - Google Patents

A method for alloying metals to substrates such as semiconductor wafers

Info

Publication number
AU5772369A
AU5772369A AU57723/69A AU5772369A AU5772369A AU 5772369 A AU5772369 A AU 5772369A AU 57723/69 A AU57723/69 A AU 57723/69A AU 5772369 A AU5772369 A AU 5772369A AU 5772369 A AU5772369 A AU 5772369A
Authority
AU
Australia
Prior art keywords
substrates
semiconductor wafers
alloying metals
alloying
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU57723/69A
Other versions
AU434554B2 (en
Inventor
MARTIN BLUM and JAN PETER HOEKSTRA JOSEPH
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU5772369A publication Critical patent/AU5772369A/en
Publication of AU434554B2 publication Critical patent/AU434554B2/en
Expired legal-status Critical Current

Links

AU57723/69A 1969-07-09 A method for alloying metals to substrates such as semiconductor wafers Expired AU434554B2 (en)

Publications (2)

Publication Number Publication Date
AU5772369A true AU5772369A (en) 1971-01-14
AU434554B2 AU434554B2 (en) 1971-01-14

Family

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