AU423456B2 - Metal etching process for semiconductor devices - Google Patents

Metal etching process for semiconductor devices

Info

Publication number
AU423456B2
AU423456B2 AU46479/68A AU4647968A AU423456B2 AU 423456 B2 AU423456 B2 AU 423456B2 AU 46479/68 A AU46479/68 A AU 46479/68A AU 4647968 A AU4647968 A AU 4647968A AU 423456 B2 AU423456 B2 AU 423456B2
Authority
AU
Australia
Prior art keywords
semiconductor devices
etching process
metal etching
metal
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU46479/68A
Other versions
AU4647968A (en
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU423456B2 publication Critical patent/AU423456B2/en
Publication of AU4647968A publication Critical patent/AU4647968A/en
Expired legal-status Critical Current

Links

AU46479/68A 1968-11-19 Metal etching process for semiconductor devices Expired AU423456B2 (en)

Publications (2)

Publication Number Publication Date
AU423456B2 true AU423456B2 (en) 1970-05-28
AU4647968A AU4647968A (en) 1970-05-28

Family

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