AU5740573A - Tube lined with silicon nitride - Google Patents

Tube lined with silicon nitride

Info

Publication number
AU5740573A
AU5740573A AU57405/73A AU5740573A AU5740573A AU 5740573 A AU5740573 A AU 5740573A AU 57405/73 A AU57405/73 A AU 57405/73A AU 5740573 A AU5740573 A AU 5740573A AU 5740573 A AU5740573 A AU 5740573A
Authority
AU
Australia
Prior art keywords
silicon nitride
tube lined
lined
tube
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU57405/73A
Other languages
English (en)
Inventor
George Albert Apoloni Asselman
Wilhelmus Johannes Mari Hamers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GEORGE ALBERT APOLONIA ASSELMA
WILHELMUS JOHANNES MARIA HAMER
Original Assignee
GEORGE ALBERT APOLONIA ASSELMA
WILHELMUS JOHANNES MARIA HAMER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEORGE ALBERT APOLONIA ASSELMA, WILHELMUS JOHANNES MARIA HAMER filed Critical GEORGE ALBERT APOLONIA ASSELMA
Publication of AU5740573A publication Critical patent/AU5740573A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
AU57405/73A 1972-07-01 1973-06-27 Tube lined with silicon nitride Expired AU5740573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7209294A NL7209294A (ko) 1972-07-01 1972-07-01

Publications (1)

Publication Number Publication Date
AU5740573A true AU5740573A (en) 1975-01-09

Family

ID=19816451

Family Applications (1)

Application Number Title Priority Date Filing Date
AU57405/73A Expired AU5740573A (en) 1972-07-01 1973-06-27 Tube lined with silicon nitride

Country Status (10)

Country Link
JP (1) JPS4943880A (ko)
AU (1) AU5740573A (ko)
BE (1) BE801747A (ko)
BR (1) BR7304772D0 (ko)
DE (1) DE2330720C3 (ko)
FR (1) FR2190946B1 (ko)
GB (1) GB1420526A (ko)
IT (1) IT990832B (ko)
NL (1) NL7209294A (ko)
SE (1) SE384537B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3070578D1 (en) * 1979-08-16 1985-06-05 Ibm Process for applying sio2 films by chemical vapour deposition
DE3441056A1 (de) * 1984-11-09 1986-05-22 Siemens AG, 1000 Berlin und 8000 München Verfahren zur verminderung des verschleisses von bei der gasphasenabscheidung von silizium verwendeten quarzteilen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200015A (en) * 1962-09-10 1965-08-10 United Aircraft Corp Process for coating high temperature alloys
FR1524841A (fr) * 1966-06-01 1968-05-10 Siemens Ag Procédé pour la préparation de nitrure de silicium attaquable chimiquement sous forme de couches minces
US3637423A (en) * 1969-02-10 1972-01-25 Westinghouse Electric Corp Pyrolytic deposition of silicon nitride films
DE1957952A1 (de) * 1969-11-18 1971-05-27 Siemens Ag Siliciumnitridbeschichtung an Quarzwaenden fuer Diffusions- und Oxydationsreaktoren

Also Published As

Publication number Publication date
DE2330720C3 (de) 1979-01-18
IT990832B (it) 1975-07-10
DE2330720B2 (de) 1978-05-24
JPS4943880A (ko) 1974-04-25
FR2190946B1 (ko) 1977-05-13
NL7209294A (ko) 1974-01-03
BR7304772D0 (pt) 1974-08-15
DE2330720A1 (de) 1974-01-10
BE801747A (fr) 1974-01-02
FR2190946A1 (ko) 1974-02-01
SE384537B (sv) 1976-05-10
GB1420526A (en) 1976-01-07

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