AU5711000A - Method for manufacturing a semiconductor device having a metal layer floating over a substrate - Google Patents

Method for manufacturing a semiconductor device having a metal layer floating over a substrate

Info

Publication number
AU5711000A
AU5711000A AU57110/00A AU5711000A AU5711000A AU 5711000 A AU5711000 A AU 5711000A AU 57110/00 A AU57110/00 A AU 57110/00A AU 5711000 A AU5711000 A AU 5711000A AU 5711000 A AU5711000 A AU 5711000A
Authority
AU
Australia
Prior art keywords
substrate
manufacturing
semiconductor device
metal layer
layer floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU57110/00A
Inventor
Chul Hi Han
Choong Ki Kim
Eui Sik Yoon
Jun Bo Yoon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019990027603A external-priority patent/KR20000011585A/en
Application filed by Korea Advanced Institute of Science and Technology KAIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Publication of AU5711000A publication Critical patent/AU5711000A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64—Impedance arrangements
    • H01L23/645—Inductive arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
AU57110/00A 1999-07-08 2000-07-07 Method for manufacturing a semiconductor device having a metal layer floating over a substrate Abandoned AU5711000A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1019990027603A KR20000011585A (en) 1998-07-28 1999-07-08 Semiconductor device and method for manufacturing the same
KR9927603 1999-07-08
PCT/KR2000/000737 WO2001004953A1 (en) 1999-07-08 2000-07-07 Method for manufacturing a semiconductor device having a metal layer floating over a substrate

Publications (1)

Publication Number Publication Date
AU5711000A true AU5711000A (en) 2001-01-30

Family

ID=19600444

Family Applications (1)

Application Number Title Priority Date Filing Date
AU57110/00A Abandoned AU5711000A (en) 1999-07-08 2000-07-07 Method for manufacturing a semiconductor device having a metal layer floating over a substrate

Country Status (2)

Country Link
AU (1) AU5711000A (en)
WO (1) WO2001004953A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2833411B1 (en) * 2001-12-11 2004-02-27 Memscap METHOD FOR MANUFACTURING AN ELECTRONIC COMPONENT INCORPORATING AN INDUCTIVE MICRO-COMPONENT

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5111169A (en) * 1989-03-23 1992-05-05 Takeshi Ikeda Lc noise filter
JPH0377360A (en) * 1989-08-18 1991-04-02 Mitsubishi Electric Corp Semiconductor device
WO1994017558A1 (en) * 1993-01-29 1994-08-04 The Regents Of The University Of California Monolithic passive component
US5478773A (en) * 1994-04-28 1995-12-26 Motorola, Inc. Method of making an electronic device having an integrated inductor
US5446311A (en) * 1994-09-16 1995-08-29 International Business Machines Corporation High-Q inductors in silicon technology without expensive metalization
JPH08330517A (en) * 1995-05-31 1996-12-13 Sanyo Electric Co Ltd Integrated circuit device and resonant circuit
SE510443C2 (en) * 1996-05-31 1999-05-25 Ericsson Telefon Ab L M Inductors for integrated circuits
US5773870A (en) * 1996-09-10 1998-06-30 National Science Council Membrane type integrated inductor and the process thereof
US5805043A (en) * 1996-10-02 1998-09-08 Itt Industries, Inc. High Q compact inductors for monolithic integrated circuit applications
US6008102A (en) * 1998-04-09 1999-12-28 Motorola, Inc. Method of forming a three-dimensional integrated inductor
KR20000011585A (en) * 1998-07-28 2000-02-25 윤덕용 Semiconductor device and method for manufacturing the same

Also Published As

Publication number Publication date
WO2001004953A1 (en) 2001-01-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase