AU513861B2 - Photopolmer laying apparatus - Google Patents

Photopolmer laying apparatus

Info

Publication number
AU513861B2
AU513861B2 AU13294/76A AU1329476A AU513861B2 AU 513861 B2 AU513861 B2 AU 513861B2 AU 13294/76 A AU13294/76 A AU 13294/76A AU 1329476 A AU1329476 A AU 1329476A AU 513861 B2 AU513861 B2 AU 513861B2
Authority
AU
Australia
Prior art keywords
photopolmer
laying apparatus
laying
photopolmer laying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU13294/76A
Other languages
English (en)
Other versions
AU1329476A (en
Inventor
NE Hughes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hercules LLC
Original Assignee
Hercules LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hercules LLC filed Critical Hercules LLC
Publication of AU1329476A publication Critical patent/AU1329476A/en
Application granted granted Critical
Publication of AU513861B2 publication Critical patent/AU513861B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
AU13294/76A 1975-04-23 1976-04-23 Photopolmer laying apparatus Expired AU513861B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57103075A 1975-04-23 1975-04-23
USUS571030 1975-04-23

Publications (2)

Publication Number Publication Date
AU1329476A AU1329476A (en) 1977-10-27
AU513861B2 true AU513861B2 (en) 1981-01-08

Family

ID=24282043

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13294/76A Expired AU513861B2 (en) 1975-04-23 1976-04-23 Photopolmer laying apparatus

Country Status (9)

Country Link
JP (1) JPS6041345B2 (bs)
AU (1) AU513861B2 (bs)
BE (1) BE840730A (bs)
BR (1) BR7602443A (bs)
CA (1) CA1074098A (bs)
DE (1) DE2615880C3 (bs)
FR (1) FR2308957A1 (bs)
GB (1) GB1527045A (bs)
NL (1) NL7604190A (bs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254155A (ja) * 1986-04-28 1987-11-05 Asahi Chem Ind Co Ltd 粘性物質の積層成型装置

Also Published As

Publication number Publication date
BR7602443A (pt) 1976-10-19
FR2308957B1 (bs) 1982-02-19
FR2308957A1 (fr) 1976-11-19
DE2615880A1 (de) 1976-11-04
DE2615880C3 (de) 1980-11-13
GB1527045A (en) 1978-10-04
DE2615880B2 (de) 1980-03-20
NL7604190A (nl) 1976-10-26
BE840730A (fr) 1976-08-02
CA1074098A (en) 1980-03-25
JPS51129308A (en) 1976-11-10
JPS6041345B2 (ja) 1985-09-17
AU1329476A (en) 1977-10-27

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