AU492357B2 - Ion implantation in semiconductors - Google Patents

Ion implantation in semiconductors

Info

Publication number
AU492357B2
AU492357B2 AU82581/75A AU8258175A AU492357B2 AU 492357 B2 AU492357 B2 AU 492357B2 AU 82581/75 A AU82581/75 A AU 82581/75A AU 8258175 A AU8258175 A AU 8258175A AU 492357 B2 AU492357 B2 AU 492357B2
Authority
AU
Australia
Prior art keywords
semiconductors
ion implantation
implantation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU82581/75A
Other versions
AU8258175A (en
Inventor
Joseph Masters Burton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Filing date
Publication of AU492357B2 publication Critical patent/AU492357B2/en
Priority claimed from US05/488,376 external-priority patent/US3945856A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU8258175A publication Critical patent/AU8258175A/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

AU82581/75A 1975-06-30 Ion implantation in semiconductors Expired AU492357B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/488,376 US3945856A (en) 1974-07-15 1974-07-15 Method of ion implantation through an electrically insulative material

Publications (2)

Publication Number Publication Date
AU492357B2 true AU492357B2 (en)
AU8258175A AU8258175A (en) 1977-01-06

Family

ID=

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