AU4583079A - Automatic measurement of high-precision etched structures - Google Patents

Automatic measurement of high-precision etched structures

Info

Publication number
AU4583079A
AU4583079A AU45830/79A AU4583079A AU4583079A AU 4583079 A AU4583079 A AU 4583079A AU 45830/79 A AU45830/79 A AU 45830/79A AU 4583079 A AU4583079 A AU 4583079A AU 4583079 A AU4583079 A AU 4583079A
Authority
AU
Australia
Prior art keywords
automatic measurement
etched structures
precision etched
precision
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU45830/79A
Inventor
Walter Glashauser
Hans-Jurgen Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of AU4583079A publication Critical patent/AU4583079A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
    • G01B11/285—Measuring arrangements characterised by the use of optical techniques for measuring areas using photoelectric detection means

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AU45830/79A 1978-04-10 1979-04-09 Automatic measurement of high-precision etched structures Abandoned AU4583079A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE28153733 1978-04-10
DE19782815373 DE2815373A1 (en) 1978-04-10 1978-04-10 METHOD AND DEVICE FOR TESTING HIGH-PRECISION FORMAT PARTS

Publications (1)

Publication Number Publication Date
AU4583079A true AU4583079A (en) 1979-10-18

Family

ID=6036555

Family Applications (1)

Application Number Title Priority Date Filing Date
AU45830/79A Abandoned AU4583079A (en) 1978-04-10 1979-04-09 Automatic measurement of high-precision etched structures

Country Status (7)

Country Link
EP (1) EP0004615A1 (en)
JP (1) JPS54139752A (en)
AU (1) AU4583079A (en)
BR (1) BR7902168A (en)
DE (1) DE2815373A1 (en)
GB (1) GB2018983A (en)
ZA (1) ZA791680B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8411673D0 (en) * 1984-05-08 1984-06-13 Binns I D Assessing power coatings
JP4179585B2 (en) 2002-03-29 2008-11-12 ユニ・チャーム株式会社 Printed biodegradable plastic film

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3419446A (en) * 1965-02-15 1968-12-31 Chemcut Corp Method and means for continuous control of etching rate
US3503817A (en) * 1966-01-24 1970-03-31 Fmc Corp Process for controlling metal etching operation
US3663724A (en) * 1969-11-14 1972-05-16 Chemcut Corp Built-in type speed control for conveyorized continuous etcher
US3669771A (en) * 1970-01-28 1972-06-13 Zenith Radio Corp Process of etching a shadow mask
US3664942A (en) * 1970-12-31 1972-05-23 Ibm End point detection method and apparatus for sputter etching

Also Published As

Publication number Publication date
ZA791680B (en) 1980-04-30
GB2018983A (en) 1979-10-24
DE2815373A1 (en) 1979-10-11
BR7902168A (en) 1979-12-04
JPS54139752A (en) 1979-10-30
EP0004615A1 (en) 1979-10-17

Similar Documents

Publication Publication Date Title
AU523866B2 (en) Manufacture of film
AU509265B2 (en) Alignment indicator
AU4879579A (en) Profile measurement
GB2039034B (en) Measuring dimensions of an object
AU516719B2 (en) Preparation of cis-hexahydrodibenzopyranones
AU525176B2 (en) Coilable tape measures
GB2020018A (en) Determination of pyruvic acid
GB2021260B (en) Optical gauging of cross-sectional dimensions
AU521740B2 (en) Manufacture of methanol
JPS55115834A (en) Manufacture of alcohol
GB2025342B (en) Aircraft insturment indicating windshear
AU5147679A (en) Preparation of 2-chlorosulfinylazetidinones
AU5390579A (en) Compositions of thiazolidine-4-carboxylic acid
AU533516B2 (en) Manufacture of aza-spirodecanes
AU529000B2 (en) Etching of polymers
AU4583079A (en) Automatic measurement of high-precision etched structures
AU528337B2 (en) Derivatives of pyrrolidinecarboxaldehyde
AU511464B2 (en) Measuring characteristics of fluid materials
JPS54159258A (en) Method of measuring flatness
AU515916B2 (en) Ethers of clavulanic acid
AU529069B2 (en) Preparation of tetramisole
AU543276B2 (en) Resolution of dl-trans-chrysanthemic acid
AU513119B2 (en) Measuring dimensions of fibres
GB2020845B (en) Optical compensation of measuring errors
GB2036479B (en) Devices for determining steady-state values of analogue signals