AU453174B2 - Method forthe production of silicon oxynitride - Google Patents

Method forthe production of silicon oxynitride

Info

Publication number
AU453174B2
AU453174B2 AU30311/71A AU3031171A AU453174B2 AU 453174 B2 AU453174 B2 AU 453174B2 AU 30311/71 A AU30311/71 A AU 30311/71A AU 3031171 A AU3031171 A AU 3031171A AU 453174 B2 AU453174 B2 AU 453174B2
Authority
AU
Australia
Prior art keywords
silicon oxynitride
forthe production
method forthe
production
oxynitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU30311/71A
Other versions
AU3031171A (en
Inventor
Edward Washburn Malcolm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co filed Critical Norton Co
Application granted granted Critical
Publication of AU453174B2 publication Critical patent/AU453174B2/en
Publication of AU3031171A publication Critical patent/AU3031171A/en
Expired legal-status Critical Current

Links

AU30311/71A 1970-06-29 1971-06-22 Method forthe production of silicon oxynitride Expired AU453174B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS50939 1970-06-29

Publications (2)

Publication Number Publication Date
AU453174B2 true AU453174B2 (en) 1973-01-04
AU3031171A AU3031171A (en) 1973-01-04

Family

ID=

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