CA868267A - Production of silicon oxynitride - Google Patents

Production of silicon oxynitride

Info

Publication number
CA868267A
CA868267A CA868267A CA868267DA CA868267A CA 868267 A CA868267 A CA 868267A CA 868267 A CA868267 A CA 868267A CA 868267D A CA868267D A CA 868267DA CA 868267 A CA868267 A CA 868267A
Authority
CA
Canada
Prior art keywords
production
silicon oxynitride
oxynitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA868267A
Inventor
E. Washburn Malcolm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Publication date
Application granted granted Critical
Publication of CA868267A publication Critical patent/CA868267A/en
Expired legal-status Critical Current

Links

CA868267A Production of silicon oxynitride Expired CA868267A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA868267T

Publications (1)

Publication Number Publication Date
CA868267A true CA868267A (en) 1971-04-13

Family

ID=36354372

Family Applications (1)

Application Number Title Priority Date Filing Date
CA868267A Expired CA868267A (en) Production of silicon oxynitride

Country Status (1)

Country Link
CA (1) CA868267A (en)

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