AU412375B2 - Production of positive polymeric resist images - Google Patents

Production of positive polymeric resist images

Info

Publication number
AU412375B2
AU412375B2 AU15219/66A AU1521966A AU412375B2 AU 412375 B2 AU412375 B2 AU 412375B2 AU 15219/66 A AU15219/66 A AU 15219/66A AU 1521966 A AU1521966 A AU 1521966A AU 412375 B2 AU412375 B2 AU 412375B2
Authority
AU
Australia
Prior art keywords
production
resist images
polymeric resist
positive polymeric
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU15219/66A
Other versions
AU1521966A (en
Inventor
Simon Doetsch Albert
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU412375B2 publication Critical patent/AU412375B2/en
Publication of AU1521966A publication Critical patent/AU1521966A/en
Expired legal-status Critical Current

Links

AU15219/66A 1966-12-13 Production of positive polymeric resist images Expired AU412375B2 (en)

Publications (2)

Publication Number Publication Date
AU412375B2 true AU412375B2 (en) 1968-06-13
AU1521966A AU1521966A (en) 1968-06-13

Family

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