AU1521966A - Production of positive polymeric resist images - Google Patents

Production of positive polymeric resist images

Info

Publication number
AU1521966A
AU1521966A AU15219/66A AU1521966A AU1521966A AU 1521966 A AU1521966 A AU 1521966A AU 15219/66 A AU15219/66 A AU 15219/66A AU 1521966 A AU1521966 A AU 1521966A AU 1521966 A AU1521966 A AU 1521966A
Authority
AU
Australia
Prior art keywords
production
resist images
polymeric resist
positive polymeric
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU15219/66A
Other versions
AU412375B2 (en
Inventor
Simon Doetsch Albert
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU1521966A publication Critical patent/AU1521966A/en
Publication of AU412375B2 publication Critical patent/AU412375B2/en
Expired legal-status Critical Current

Links

AU15219/66A 1966-12-13 Production of positive polymeric resist images Expired AU412375B2 (en)

Publications (2)

Publication Number Publication Date
AU1521966A true AU1521966A (en) 1968-06-13
AU412375B2 AU412375B2 (en) 1968-06-13

Family

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