AU3663099A - Method and apparatus for monitoring plasma processing operations - Google Patents

Method and apparatus for monitoring plasma processing operations

Info

Publication number
AU3663099A
AU3663099A AU36630/99A AU3663099A AU3663099A AU 3663099 A AU3663099 A AU 3663099A AU 36630/99 A AU36630/99 A AU 36630/99A AU 3663099 A AU3663099 A AU 3663099A AU 3663099 A AU3663099 A AU 3663099A
Authority
AU
Australia
Prior art keywords
plasma processing
processing operations
monitoring plasma
monitoring
operations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU36630/99A
Inventor
Michael Lane Smith Jr.
Joel O'don Stevenson
Pamela Denise Peardon Ward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Technology and Engineering Solutions of Sandia LLC
Original Assignee
Sandia Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/064,991 external-priority patent/US6246473B1/en
Priority claimed from US09/065,203 external-priority patent/US6192826B1/en
Priority claimed from US09/065,257 external-priority patent/US6123983A/en
Priority claimed from US09/065,358 external-priority patent/US6419801B1/en
Priority claimed from US09/065,006 external-priority patent/US6090302A/en
Priority claimed from US09/065,359 external-priority patent/US6157447A/en
Priority claimed from US09/064,965 external-priority patent/US6254717B1/en
Priority claimed from US09/065,362 external-priority patent/US6132577A/en
Priority claimed from US09/064,793 external-priority patent/US6134005A/en
Priority claimed from US09/065,195 external-priority patent/US6223755B1/en
Priority claimed from US09/065,307 external-priority patent/US6261470B1/en
Priority claimed from US09/064,957 external-priority patent/US6221679B1/en
Priority claimed from US09/064,970 external-priority patent/US6269278B1/en
Priority claimed from US09/065,274 external-priority patent/US6275740B1/en
Priority claimed from US09/064,966 external-priority patent/US6165312A/en
Priority claimed from US09/065,247 external-priority patent/US6169933B1/en
Priority claimed from US09/065,680 external-priority patent/US6077386A/en
Priority claimed from PCT/US1999/008862 external-priority patent/WO1999054759A1/en
Priority claimed from PCT/US1999/008894 external-priority patent/WO1999054694A1/en
Application filed by Sandia Corp filed Critical Sandia Corp
Publication of AU3663099A publication Critical patent/AU3663099A/en
Abandoned legal-status Critical Current

Links

AU36630/99A 1998-04-23 1999-04-23 Method and apparatus for monitoring plasma processing operations Abandoned AU3663099A (en)

Applications Claiming Priority (40)

Application Number Priority Date Filing Date Title
US6524598A 1998-04-23 1998-04-23
US6497298A 1998-04-23 1998-04-23
US09065203 1998-04-23
US09/065,203 US6192826B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065359 1998-04-23
US09065362 1998-04-23
US09065245 1998-04-23
US09/065,358 US6419801B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09/065,006 US6090302A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065307 1998-04-23
US09064957 1998-04-23
US09/065,359 US6157447A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09/064,965 US6254717B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09064966 1998-04-23
US09/065,362 US6132577A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09064972 1998-04-23
US09065247 1998-04-23
US09/064,970 US6269278B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065257 1998-04-23
US09/065,195 US6223755B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09064970 1998-04-23
US09/064,991 US6246473B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09064991 1998-04-23
US09/065,257 US6123983A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065274 1998-04-23
US09064965 1998-04-23
US09/064,793 US6134005A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065006 1998-04-23
US09065680 1998-04-23
US09065195 1998-04-23
US09/065,274 US6275740B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09/064,966 US6165312A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09/065,247 US6169933B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09065358 1998-04-23
US09/065,680 US6077386A (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09064793 1998-04-23
US09/064,957 US6221679B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
US09/065,307 US6261470B1 (en) 1998-04-23 1998-04-23 Method and apparatus for monitoring plasma processing operations
PCT/US1999/008862 WO1999054759A1 (en) 1998-04-22 1999-04-22 Porosity and permeability measurement of underground formations containing crude oil, using epr response data
PCT/US1999/008894 WO1999054694A1 (en) 1998-04-23 1999-04-23 Method and apparatus for monitoring plasma processing operations

Publications (1)

Publication Number Publication Date
AU3663099A true AU3663099A (en) 1999-11-08

Family

ID=27586300

Family Applications (1)

Application Number Title Priority Date Filing Date
AU36630/99A Abandoned AU3663099A (en) 1998-04-23 1999-04-23 Method and apparatus for monitoring plasma processing operations

Country Status (1)

Country Link
AU (1) AU3663099A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7672747B2 (en) 2000-03-30 2010-03-02 Lam Research Corporation Recipe-and-component control module and methods thereof
US7565220B2 (en) 2006-09-28 2009-07-21 Lam Research Corporation Targeted data collection architecture
US7814046B2 (en) 2006-09-29 2010-10-12 Lam Research Corporation Dynamic component-tracking system and methods therefor
US8010483B2 (en) 2006-09-29 2011-08-30 Lam Research Corporation Component-tracking system and methods therefor
US8295963B2 (en) 2007-03-29 2012-10-23 Lam Research Corporation Methods for performing data management for a recipe-and-component control module

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase