AU3663099A - Method and apparatus for monitoring plasma processing operations - Google Patents
Method and apparatus for monitoring plasma processing operationsInfo
- Publication number
- AU3663099A AU3663099A AU36630/99A AU3663099A AU3663099A AU 3663099 A AU3663099 A AU 3663099A AU 36630/99 A AU36630/99 A AU 36630/99A AU 3663099 A AU3663099 A AU 3663099A AU 3663099 A AU3663099 A AU 3663099A
- Authority
- AU
- Australia
- Prior art keywords
- plasma processing
- processing operations
- monitoring plasma
- monitoring
- operations
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Applications Claiming Priority (40)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6524598A | 1998-04-23 | 1998-04-23 | |
US6497298A | 1998-04-23 | 1998-04-23 | |
US09065203 | 1998-04-23 | ||
US09/065,203 US6192826B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065359 | 1998-04-23 | ||
US09065362 | 1998-04-23 | ||
US09065245 | 1998-04-23 | ||
US09/065,358 US6419801B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09/065,006 US6090302A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065307 | 1998-04-23 | ||
US09064957 | 1998-04-23 | ||
US09/065,359 US6157447A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09/064,965 US6254717B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09064966 | 1998-04-23 | ||
US09/065,362 US6132577A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09064972 | 1998-04-23 | ||
US09065247 | 1998-04-23 | ||
US09/064,970 US6269278B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065257 | 1998-04-23 | ||
US09/065,195 US6223755B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09064970 | 1998-04-23 | ||
US09/064,991 US6246473B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09064991 | 1998-04-23 | ||
US09/065,257 US6123983A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065274 | 1998-04-23 | ||
US09064965 | 1998-04-23 | ||
US09/064,793 US6134005A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065006 | 1998-04-23 | ||
US09065680 | 1998-04-23 | ||
US09065195 | 1998-04-23 | ||
US09/065,274 US6275740B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09/064,966 US6165312A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09/065,247 US6169933B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09065358 | 1998-04-23 | ||
US09/065,680 US6077386A (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09064793 | 1998-04-23 | ||
US09/064,957 US6221679B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
US09/065,307 US6261470B1 (en) | 1998-04-23 | 1998-04-23 | Method and apparatus for monitoring plasma processing operations |
PCT/US1999/008862 WO1999054759A1 (en) | 1998-04-22 | 1999-04-22 | Porosity and permeability measurement of underground formations containing crude oil, using epr response data |
PCT/US1999/008894 WO1999054694A1 (en) | 1998-04-23 | 1999-04-23 | Method and apparatus for monitoring plasma processing operations |
Publications (1)
Publication Number | Publication Date |
---|---|
AU3663099A true AU3663099A (en) | 1999-11-08 |
Family
ID=27586300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU36630/99A Abandoned AU3663099A (en) | 1998-04-23 | 1999-04-23 | Method and apparatus for monitoring plasma processing operations |
Country Status (1)
Country | Link |
---|---|
AU (1) | AU3663099A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7565220B2 (en) | 2006-09-28 | 2009-07-21 | Lam Research Corporation | Targeted data collection architecture |
US7672747B2 (en) | 2000-03-30 | 2010-03-02 | Lam Research Corporation | Recipe-and-component control module and methods thereof |
US7814046B2 (en) | 2006-09-29 | 2010-10-12 | Lam Research Corporation | Dynamic component-tracking system and methods therefor |
-
1999
- 1999-04-23 AU AU36630/99A patent/AU3663099A/en not_active Abandoned
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7672747B2 (en) | 2000-03-30 | 2010-03-02 | Lam Research Corporation | Recipe-and-component control module and methods thereof |
US7565220B2 (en) | 2006-09-28 | 2009-07-21 | Lam Research Corporation | Targeted data collection architecture |
US7814046B2 (en) | 2006-09-29 | 2010-10-12 | Lam Research Corporation | Dynamic component-tracking system and methods therefor |
US8010483B2 (en) | 2006-09-29 | 2011-08-30 | Lam Research Corporation | Component-tracking system and methods therefor |
US8295963B2 (en) | 2007-03-29 | 2012-10-23 | Lam Research Corporation | Methods for performing data management for a recipe-and-component control module |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |