AU249670B2 - Process forthe manufacture of high purity metallic silicon by thermal decomposition of monosilane and apparatus therefor - Google Patents

Process forthe manufacture of high purity metallic silicon by thermal decomposition of monosilane and apparatus therefor

Info

Publication number
AU249670B2
AU249670B2 AU60022/60A AU6002260A AU249670B2 AU 249670 B2 AU249670 B2 AU 249670B2 AU 60022/60 A AU60022/60 A AU 60022/60A AU 6002260 A AU6002260 A AU 6002260A AU 249670 B2 AU249670 B2 AU 249670B2
Authority
AU
Australia
Prior art keywords
monosilane
high purity
thermal decomposition
apparatus therefor
metallic silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU60022/60A
Other versions
AU6002260A (en
Inventor
Ishizuka Hiroshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of AU249670B2 publication Critical patent/AU249670B2/en
Publication of AU6002260A publication Critical patent/AU6002260A/en
Expired legal-status Critical Current

Links

AU60022/60A 1960-05-03 Process forthe manufacture of high purity metallic silicon by thermal decomposition of monosilane and apparatus therefor Expired AU249670B2 (en)

Publications (2)

Publication Number Publication Date
AU249670B2 true AU249670B2 (en) 1960-11-03
AU6002260A AU6002260A (en) 1960-11-03

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