AU2464400A - Probe card - Google Patents

Probe card

Info

Publication number
AU2464400A
AU2464400A AU24644/00A AU2464400A AU2464400A AU 2464400 A AU2464400 A AU 2464400A AU 24644/00 A AU24644/00 A AU 24644/00A AU 2464400 A AU2464400 A AU 2464400A AU 2464400 A AU2464400 A AU 2464400A
Authority
AU
Australia
Prior art keywords
probe card
probe
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
AU24644/00A
Inventor
Young Kyun Ahn
Sam Won Chung
Ha Poong Jeong
Dong Il Kim
Soo Hak Kim
Byung Chang Song
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HO SAN ELECTRONICS CO Ltd
Original Assignee
HO SAN ELECTRONICS CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HO SAN ELECTRONICS CO Ltd filed Critical HO SAN ELECTRONICS CO Ltd
Publication of AU2464400A publication Critical patent/AU2464400A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
AU24644/00A 1999-11-19 2000-02-03 Probe card Withdrawn AU2464400A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR9951626 1999-11-19
KR1019990051626A KR100278104B1 (en) 1999-11-19 1999-11-19 Probe card
PCT/KR2000/000086 WO2001036986A1 (en) 1999-11-19 2000-02-03 Probe card

Publications (1)

Publication Number Publication Date
AU2464400A true AU2464400A (en) 2001-05-30

Family

ID=19620930

Family Applications (1)

Application Number Title Priority Date Filing Date
AU24644/00A Withdrawn AU2464400A (en) 1999-11-19 2000-02-03 Probe card

Country Status (3)

Country Link
KR (1) KR100278104B1 (en)
AU (1) AU2464400A (en)
WO (1) WO2001036986A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002015260A1 (en) * 2000-08-16 2002-02-21 Nanomechatronics Inc Probe, probe card and probe manufacturing method
KR20000064001A (en) * 2000-08-16 2000-11-06 홍영희 Probe and probe card
KR100805217B1 (en) * 2007-08-02 2008-02-21 주식회사 에이엠에스티 Probe card
KR101122479B1 (en) * 2010-01-08 2012-02-29 삼성전기주식회사 Probe card
KR101227547B1 (en) * 2011-07-15 2013-01-31 주식회사 세디콘 Probe card

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3116326B2 (en) * 1992-12-01 2000-12-11 日本電信電話株式会社 Probe card
US5559446A (en) * 1993-07-19 1996-09-24 Tokyo Electron Kabushiki Kaisha Probing method and device
KR0117115Y1 (en) * 1993-12-17 1998-04-27 문정환 Probe card for wafer test
KR970006517Y1 (en) * 1993-12-21 1997-06-25 금성일렉트론 주식회사 Probe card of wafer test
JPH0915262A (en) * 1995-06-28 1997-01-17 Nec Kansai Ltd Probe card

Also Published As

Publication number Publication date
KR100278104B1 (en) 2001-01-15
KR20000017761A (en) 2000-04-06
WO2001036986A1 (en) 2001-05-25

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Legal Events

Date Code Title Description
MK13 Application withdrawn section 141(2)/reg 8.3(2) - pct appl. non-entering nat. phase, withdrawn by applicant