AU2392367A - Growth of silicon nitride thin films - Google Patents

Growth of silicon nitride thin films

Info

Publication number
AU2392367A
AU2392367A AU23923/67A AU2392367A AU2392367A AU 2392367 A AU2392367 A AU 2392367A AU 23923/67 A AU23923/67 A AU 23923/67A AU 2392367 A AU2392367 A AU 2392367A AU 2392367 A AU2392367 A AU 2392367A
Authority
AU
Australia
Prior art keywords
growth
silicon nitride
thin films
nitride thin
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23923/67A
Inventor
BERTRAM SCHWARTZ and FRANCIS LEE WORTHING MICHAEL JOSEPH GRIECO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of AU2392367A publication Critical patent/AU2392367A/en
Expired legal-status Critical Current

Links

AU23923/67A 1966-09-06 1967-06-30 Growth of silicon nitride thin films Expired AU2392367A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS577208 1966-09-06

Publications (1)

Publication Number Publication Date
AU2392367A true AU2392367A (en) 1969-01-09

Family

ID=

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