AU2021213252A1 - Machine learning-based root cause analysis of process cycle images - Google Patents

Machine learning-based root cause analysis of process cycle images Download PDF

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AU2021213252A1
AU2021213252A1 AU2021213252A AU2021213252A AU2021213252A1 AU 2021213252 A1 AU2021213252 A1 AU 2021213252A1 AU 2021213252 A AU2021213252 A AU 2021213252A AU 2021213252 A AU2021213252 A AU 2021213252A AU 2021213252 A1 AU2021213252 A1 AU 2021213252A1
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images
image
random forest
forest classifier
classifier
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Pedro Miguel Filipe Cruz
Naghmeh REZAEI
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Illumina Inc
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Illumina Inc
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AU2021213252A 2020-01-31 2021-01-29 Machine learning-based root cause analysis of process cycle images Pending AU2021213252A1 (en)

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US202062968950P 2020-01-31 2020-01-31
US62/968,950 2020-01-31
US17/161,595 US11715200B2 (en) 2020-01-31 2021-01-28 Machine learning-based root cause analysis of process cycle images
US17/161,595 2021-01-28
PCT/US2021/015906 WO2021155291A1 (en) 2020-01-31 2021-01-29 Machine learning-based root cause analysis of process cycle images

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EP (1) EP4097635B1 (https=)
JP (1) JP7815125B2 (https=)
KR (1) KR102767441B1 (https=)
CN (1) CN115004249B (https=)
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JP7815125B2 (ja) 2026-02-17
CA3166380A1 (en) 2021-08-05
WO2021155291A1 (en) 2021-08-05
CN115004249B (zh) 2025-10-28
EP4097635A1 (en) 2022-12-07
US20210241048A1 (en) 2021-08-05
US11715200B2 (en) 2023-08-01
KR20220134752A (ko) 2022-10-05
JP2023512665A (ja) 2023-03-28
EP4097635B1 (en) 2025-11-12
KR102767441B1 (ko) 2025-02-13

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