AU2014903995A0 - A method of patterning a layer - Google Patents

A method of patterning a layer

Info

Publication number
AU2014903995A0
AU2014903995A0 AU2014903995A AU2014903995A AU2014903995A0 AU 2014903995 A0 AU2014903995 A0 AU 2014903995A0 AU 2014903995 A AU2014903995 A AU 2014903995A AU 2014903995 A AU2014903995 A AU 2014903995A AU 2014903995 A0 AU2014903995 A0 AU 2014903995A0
Authority
AU
Australia
Prior art keywords
patterning
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2014903995A
Inventor
Alison Joan Lennon
Zhongtian LI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NewSouth Innovations Pty Ltd
Original Assignee
NewSouth Innovations Pty Ltd
Filing date
Publication date
Application filed by NewSouth Innovations Pty Ltd filed Critical NewSouth Innovations Pty Ltd
Publication of AU2014903995A0 publication Critical patent/AU2014903995A0/en
Priority to US15/517,156 priority Critical patent/US10269991B2/en
Priority to PCT/AU2015/000602 priority patent/WO2016054677A1/en
Priority to TW104133019A priority patent/TWI707199B/en
Abandoned legal-status Critical Current

Links

AU2014903995A 2014-10-07 2014-10-07 A method of patterning a layer Abandoned AU2014903995A0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US15/517,156 US10269991B2 (en) 2014-10-07 2015-10-07 Method of patterning a layer
PCT/AU2015/000602 WO2016054677A1 (en) 2014-10-07 2015-10-07 A method of patterning a layer
TW104133019A TWI707199B (en) 2014-10-07 2015-10-07 A method of patterning a layer

Publications (1)

Publication Number Publication Date
AU2014903995A0 true AU2014903995A0 (en) 2014-10-23

Family

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