AU2009903824A0 - Crack detection using lateral scattering of long wavelength light - Google Patents

Crack detection using lateral scattering of long wavelength light

Info

Publication number
AU2009903824A0
AU2009903824A0 AU2009903824A AU2009903824A AU2009903824A0 AU 2009903824 A0 AU2009903824 A0 AU 2009903824A0 AU 2009903824 A AU2009903824 A AU 2009903824A AU 2009903824 A AU2009903824 A AU 2009903824A AU 2009903824 A0 AU2009903824 A0 AU 2009903824A0
Authority
AU
Australia
Prior art keywords
wavelength light
long wavelength
crack detection
lateral scattering
scattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2009903824A
Inventor
Thorsten Trupke
Juergen Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BT Imaging Pty Ltd
Original Assignee
BT Imaging Pty Ltd
Filing date
Publication date
Application filed by BT Imaging Pty Ltd filed Critical BT Imaging Pty Ltd
Publication of AU2009903824A0 publication Critical patent/AU2009903824A0/en
Priority to CN201080046719.9A priority Critical patent/CN102575993B/en
Priority to PCT/AU2010/001041 priority patent/WO2011017772A1/en
Priority to TW99127293A priority patent/TW201125057A/en
Abandoned legal-status Critical Current

Links

AU2009903824A 2009-08-14 2009-08-14 Crack detection using lateral scattering of long wavelength light Abandoned AU2009903824A0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201080046719.9A CN102575993B (en) 2009-08-14 2010-08-13 Detection of discontinuities in semiconductor materials
PCT/AU2010/001041 WO2011017772A1 (en) 2009-08-14 2010-08-13 Detection of discontinuities in semiconductor materials
TW99127293A TW201125057A (en) 2009-08-14 2010-08-16 Detection of discontinuities in semiconductor materials

Publications (1)

Publication Number Publication Date
AU2009903824A0 true AU2009903824A0 (en) 2009-09-03

Family

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