Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2006902411A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epitactix Pty Ltd
Original Assignee
Epitactix Pty Ltd
Filing date
Publication date
Application filed by Epitactix Pty LtdfiledCriticalEpitactix Pty Ltd
Publication of AU2006902411A0publicationCriticalpatent/AU2006902411A0/en
Priority to PCT/AU2007/000613priorityCriticalpatent/WO2007128075A2/en
Organic silica film and method for forming same, composition for forming insulating film of semiconductor device and method for producing same, wiring structure and semiconductor device