AU2003300806A1 - Compensation for errors in off-axis interferometric measurements - Google Patents
Compensation for errors in off-axis interferometric measurementsInfo
- Publication number
- AU2003300806A1 AU2003300806A1 AU2003300806A AU2003300806A AU2003300806A1 AU 2003300806 A1 AU2003300806 A1 AU 2003300806A1 AU 2003300806 A AU2003300806 A AU 2003300806A AU 2003300806 A AU2003300806 A AU 2003300806A AU 2003300806 A1 AU2003300806 A1 AU 2003300806A1
- Authority
- AU
- Australia
- Prior art keywords
- compensation
- errors
- interferometric measurements
- axis interferometric
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/630,361 US20040061869A1 (en) | 2002-07-29 | 2003-07-29 | Compensation for errors in off-axis interferometric measurements |
US10/630,361 | 2003-07-29 | ||
US51742603P | 2003-11-04 | 2003-11-04 | |
US60/517,426 | 2003-11-04 | ||
PCT/US2003/038215 WO2005017449A1 (en) | 2003-07-29 | 2003-12-03 | Compensation for errors in off-axis interferometric measurements |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003300806A1 true AU2003300806A1 (en) | 2005-03-07 |
Family
ID=34426338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003300806A Abandoned AU2003300806A1 (en) | 2003-07-29 | 2003-12-03 | Compensation for errors in off-axis interferometric measurements |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4633624B2 (en) |
AU (1) | AU2003300806A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101166249B1 (en) * | 2004-02-11 | 2012-07-18 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | A system for positioning a product |
FR2978825B1 (en) * | 2011-08-05 | 2013-08-16 | Thales Sa | OPTICAL SYSTEM FOR MEASURING CUBE-CORRUGATED HEADPHONE ORIENTATION AND OPTICAL TELECENTRIC TRANSMISSION |
FR2978826B1 (en) | 2011-08-05 | 2013-08-16 | Thales Sa | OPTICAL SYSTEM FOR CUBIC CORNER ORIENTATION MEASUREMENT AND MASK |
US8937707B2 (en) | 2011-08-23 | 2015-01-20 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3295846B2 (en) * | 1989-06-08 | 2002-06-24 | 株式会社ニコン | Position measuring method, position measuring device, positioning method, positioning device, and exposure device |
JPH0361810A (en) * | 1989-07-31 | 1991-03-18 | Kawasaki Steel Corp | Method for measuring cross-sectional profile of cylindrical object |
JPH10260009A (en) * | 1997-03-21 | 1998-09-29 | Nikon Corp | Coordinate measuring device |
AU6122099A (en) * | 1998-10-14 | 2000-05-01 | Nikon Corporation | Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device |
DE60118726T2 (en) * | 2000-05-19 | 2006-08-24 | Zygo Corp., Middlefield | IN-SITU MIRROR CHARACTERIZATION |
JP2002365016A (en) * | 2001-06-07 | 2002-12-18 | Nikon Corp | Position measurement method using interferometer, interference type position measurement apparatus, algner and exposure method |
-
2003
- 2003-12-03 AU AU2003300806A patent/AU2003300806A1/en not_active Abandoned
- 2003-12-03 JP JP2005507934A patent/JP4633624B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007521462A (en) | 2007-08-02 |
JP4633624B2 (en) | 2011-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |