AU2003300806A1 - Compensation for errors in off-axis interferometric measurements - Google Patents

Compensation for errors in off-axis interferometric measurements

Info

Publication number
AU2003300806A1
AU2003300806A1 AU2003300806A AU2003300806A AU2003300806A1 AU 2003300806 A1 AU2003300806 A1 AU 2003300806A1 AU 2003300806 A AU2003300806 A AU 2003300806A AU 2003300806 A AU2003300806 A AU 2003300806A AU 2003300806 A1 AU2003300806 A1 AU 2003300806A1
Authority
AU
Australia
Prior art keywords
compensation
errors
interferometric measurements
axis interferometric
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003300806A
Inventor
Henry A. Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/630,361 external-priority patent/US20040061869A1/en
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of AU2003300806A1 publication Critical patent/AU2003300806A1/en
Abandoned legal-status Critical Current

Links

AU2003300806A 2003-07-29 2003-12-03 Compensation for errors in off-axis interferometric measurements Abandoned AU2003300806A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/630,361 US20040061869A1 (en) 2002-07-29 2003-07-29 Compensation for errors in off-axis interferometric measurements
US10/630,361 2003-07-29
US51742603P 2003-11-04 2003-11-04
US60/517,426 2003-11-04
PCT/US2003/038215 WO2005017449A1 (en) 2003-07-29 2003-12-03 Compensation for errors in off-axis interferometric measurements

Publications (1)

Publication Number Publication Date
AU2003300806A1 true AU2003300806A1 (en) 2005-03-07

Family

ID=34426338

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003300806A Abandoned AU2003300806A1 (en) 2003-07-29 2003-12-03 Compensation for errors in off-axis interferometric measurements

Country Status (2)

Country Link
JP (1) JP4633624B2 (en)
AU (1) AU2003300806A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101166249B1 (en) * 2004-02-11 2012-07-18 코닌클리케 필립스 일렉트로닉스 엔.브이. A system for positioning a product
FR2978825B1 (en) * 2011-08-05 2013-08-16 Thales Sa OPTICAL SYSTEM FOR MEASURING CUBE-CORRUGATED HEADPHONE ORIENTATION AND OPTICAL TELECENTRIC TRANSMISSION
FR2978826B1 (en) 2011-08-05 2013-08-16 Thales Sa OPTICAL SYSTEM FOR CUBIC CORNER ORIENTATION MEASUREMENT AND MASK
US8937707B2 (en) 2011-08-23 2015-01-20 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3295846B2 (en) * 1989-06-08 2002-06-24 株式会社ニコン Position measuring method, position measuring device, positioning method, positioning device, and exposure device
JPH0361810A (en) * 1989-07-31 1991-03-18 Kawasaki Steel Corp Method for measuring cross-sectional profile of cylindrical object
JPH10260009A (en) * 1997-03-21 1998-09-29 Nikon Corp Coordinate measuring device
AU6122099A (en) * 1998-10-14 2000-05-01 Nikon Corporation Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device
DE60118726T2 (en) * 2000-05-19 2006-08-24 Zygo Corp., Middlefield IN-SITU MIRROR CHARACTERIZATION
JP2002365016A (en) * 2001-06-07 2002-12-18 Nikon Corp Position measurement method using interferometer, interference type position measurement apparatus, algner and exposure method

Also Published As

Publication number Publication date
JP2007521462A (en) 2007-08-02
JP4633624B2 (en) 2011-02-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase