AU2003290093A1 - Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating - Google Patents

Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating

Info

Publication number
AU2003290093A1
AU2003290093A1 AU2003290093A AU2003290093A AU2003290093A1 AU 2003290093 A1 AU2003290093 A1 AU 2003290093A1 AU 2003290093 A AU2003290093 A AU 2003290093A AU 2003290093 A AU2003290093 A AU 2003290093A AU 2003290093 A1 AU2003290093 A1 AU 2003290093A1
Authority
AU
Australia
Prior art keywords
variations
coating
optical element
layer thickness
corrective action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003290093A
Inventor
Thure Bohm
Rainer Borret
Alexander Dinger
Aksel Gohnermeier
Alexandra Pazidis
Thomas Petasch
Gerd Reisinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of AU2003290093A1 publication Critical patent/AU2003290093A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5873—Removal of material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU2003290093A 2002-12-19 2003-12-18 Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating Abandoned AU2003290093A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10259536 2002-12-19
DE10259536.4 2002-12-19
PCT/EP2003/014543 WO2004057378A1 (en) 2002-12-19 2003-12-18 Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating

Publications (1)

Publication Number Publication Date
AU2003290093A1 true AU2003290093A1 (en) 2004-07-14

Family

ID=32667512

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003290093A Abandoned AU2003290093A1 (en) 2002-12-19 2003-12-18 Coated optical element for corrective action obtained by producing layer thickness variations or by refraction factor variations in said coating

Country Status (2)

Country Link
AU (1) AU2003290093A1 (en)
WO (1) WO2004057378A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128984B2 (en) * 2004-08-31 2006-10-31 Corning Incorporated Surfacing of metal fluoride excimer optics
WO2006069785A1 (en) 2004-12-28 2006-07-06 Carl Zeiss Smt Ag Apparatus for mounting two or more optical elements and method for processing the surface of an optical element
EP1906253A1 (en) * 2006-09-28 2008-04-02 Carl Zeiss SMT AG Projection objective of a microlithographic projection exposure apparatus
DE102008041144A1 (en) 2007-08-21 2009-03-05 Carl Zeiss Smt Ag Optical arrangement for e.g. projection lens, has structure for optimizing arrangement with respect to angle of incident angle-dependent polarization division in phase and amplitude, and another structure compensating change of wave front
DE102015207153A1 (en) * 2015-04-20 2016-10-20 Carl Zeiss Smt Gmbh Wavefront correction element for use in an optical system
DE102017203246A1 (en) 2017-02-28 2018-08-30 Carl Zeiss Smt Gmbh Method for correcting a mirror for the wavelength range from 5 nm to 20 nm

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69702641T2 (en) * 1996-03-07 2001-04-05 Koninkl Philips Electronics Nv EXPOSURE SYSTEM AND EXPOSURE DEVICE FOR UV LITHOGRAPHY
FR2749087B1 (en) * 1996-05-21 1998-08-14 Angenieux Sa METHOD FOR CORRECTING OPTICAL ABERRATION OF A LENS
DE10016008A1 (en) * 2000-03-31 2001-10-11 Zeiss Carl Village system and its manufacture
US6849859B2 (en) * 2001-03-21 2005-02-01 Euv Limited Liability Corporation Fabrication of precision optics using an imbedded reference surface
JP4929529B2 (en) * 2001-03-27 2012-05-09 株式会社ニコン OPTICAL SYSTEM MANUFACTURING METHOD AND EXPOSURE APPARATUS PROVIDED WITH OPTICAL SYSTEM PRODUCED BY THE MANUFACTURING METHOD

Also Published As

Publication number Publication date
WO2004057378A1 (en) 2004-07-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase