AU2003289334A1 - Si LAMINATED BODY HAVING Si LAYER FORMED ON SUBSTRATE SHEET - Google Patents

Si LAMINATED BODY HAVING Si LAYER FORMED ON SUBSTRATE SHEET

Info

Publication number
AU2003289334A1
AU2003289334A1 AU2003289334A AU2003289334A AU2003289334A1 AU 2003289334 A1 AU2003289334 A1 AU 2003289334A1 AU 2003289334 A AU2003289334 A AU 2003289334A AU 2003289334 A AU2003289334 A AU 2003289334A AU 2003289334 A1 AU2003289334 A1 AU 2003289334A1
Authority
AU
Australia
Prior art keywords
layer formed
laminated body
substrate sheet
sheet
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003289334A
Other languages
English (en)
Inventor
Shigeki Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FCM Co Ltd
Original Assignee
FCM Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FCM Co Ltd filed Critical FCM Co Ltd
Publication of AU2003289334A1 publication Critical patent/AU2003289334A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
AU2003289334A 2003-01-08 2003-12-12 Si LAMINATED BODY HAVING Si LAYER FORMED ON SUBSTRATE SHEET Abandoned AU2003289334A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003-002471 2003-01-08
JP2003002471A JP4115284B2 (ja) 2003-01-08 2003-01-08 Ｓｉ積層体
PCT/JP2003/016004 WO2004062907A1 (ja) 2003-01-08 2003-12-12 基体シート上にＳｉ層を形成したＳｉ積層体

Publications (1)

Publication Number Publication Date
AU2003289334A1 true AU2003289334A1 (en) 2004-08-10

Family

ID=32708865

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003289334A Abandoned AU2003289334A1 (en) 2003-01-08 2003-12-12 Si LAMINATED BODY HAVING Si LAYER FORMED ON SUBSTRATE SHEET

Country Status (4)

Country Link
JP (1) JP4115284B2 (zh)
AU (1) AU2003289334A1 (zh)
TW (1) TW200414232A (zh)
WO (1) WO2004062907A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104669709B (zh) * 2013-11-28 2017-07-07 深圳富泰宏精密工业有限公司 外壳及其制造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264818A (ja) * 1995-03-28 1996-10-11 Asahi Chem Ind Co Ltd フィルム状アモルファスシリコン太陽電池
JPH098338A (ja) * 1995-06-22 1997-01-10 Asahi Chem Ind Co Ltd フィルム状アモルファスシリコン太陽電池
JP3346228B2 (ja) * 1997-07-11 2002-11-18 宇部興産株式会社 芳香族ポリイミドフィルム、積層体および太陽電池

Also Published As

Publication number Publication date
JP4115284B2 (ja) 2008-07-09
TW200414232A (en) 2004-08-01
JP2004209926A (ja) 2004-07-29
WO2004062907A1 (ja) 2004-07-29

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase