AU2003288242A1 - Differential pressure sensor - Google Patents

Differential pressure sensor

Info

Publication number
AU2003288242A1
AU2003288242A1 AU2003288242A AU2003288242A AU2003288242A1 AU 2003288242 A1 AU2003288242 A1 AU 2003288242A1 AU 2003288242 A AU2003288242 A AU 2003288242A AU 2003288242 A AU2003288242 A AU 2003288242A AU 2003288242 A1 AU2003288242 A1 AU 2003288242A1
Authority
AU
Australia
Prior art keywords
pressure sensor
differential pressure
differential
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003288242A
Other languages
English (en)
Inventor
Dietfried Burczyk
Thomas Gessner
Karla Hiller
Steffen Kurth
Friedrich Schwabe
Thomas Velten
Maik Wiemer
Norbert Zichner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2003288242A1 publication Critical patent/AU2003288242A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AU2003288242A 2002-12-19 2003-12-08 Differential pressure sensor Abandoned AU2003288242A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10260086 2002-12-19
DE10260086.4 2002-12-19
PCT/EP2003/013891 WO2004057291A1 (de) 2002-12-19 2003-12-08 Differenzdrucksensor

Publications (1)

Publication Number Publication Date
AU2003288242A1 true AU2003288242A1 (en) 2004-07-14

Family

ID=32667526

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003288242A Abandoned AU2003288242A1 (en) 2002-12-19 2003-12-08 Differential pressure sensor

Country Status (3)

Country Link
AU (1) AU2003288242A1 (de)
DE (1) DE10393943B3 (de)
WO (1) WO2004057291A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5558198B2 (ja) 2010-05-13 2014-07-23 三菱電機株式会社 半導体圧力センサ
DE102014108748A1 (de) 2014-06-23 2015-12-24 Endress + Hauser Gmbh + Co. Kg Kapazitiver Differenzdrucksensor und Verfahren zu seiner Herstellung
DE102014115802A1 (de) * 2014-10-30 2016-05-04 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor und Verfahren zu dessen Herstellung
DE102014115803A1 (de) * 2014-10-30 2016-05-19 Endress + Hauser Gmbh + Co. Kg MEMS-Sensor, insbesondere Differenzdrucksensor
DE102015103485A1 (de) 2015-03-10 2016-09-15 Endress + Hauser Gmbh + Co. Kg MEMS-Sensor, insb. Drucksensor
DE102015119272A1 (de) 2015-11-09 2017-05-11 Endress+Hauser Gmbh+Co. Kg Kapazitiver Drucksensor und Verfahren zu dessen Herstellung
DE102015120074A1 (de) 2015-11-19 2017-05-24 Endress+Hauser Gmbh+Co. Kg Kapazitiver Differenzdrucksensor und Verfahren zu dessen Herstellung
DE102015121625A1 (de) 2015-12-11 2017-06-14 Endress+Hauser Gmbh+Co. Kg Verfahren zur Herstellung einer Druckmesseinrichtung
DE102016106117A1 (de) 2016-04-04 2017-10-05 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
DE102016107235B3 (de) 2016-04-19 2017-01-26 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102017130430A1 (de) 2017-12-19 2019-06-19 Endress+Hauser SE+Co. KG Drucksensor
DE102018119943A1 (de) * 2018-08-16 2020-02-20 Endress+Hauser SE+Co. KG Drucksensor
JP2022059145A (ja) 2020-10-01 2022-04-13 長野計器株式会社 圧力検出素子

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061228B2 (ja) * 1987-08-13 1994-01-05 富士電機株式会社 静電容量式圧力検出器
JP2639159B2 (ja) * 1989-04-14 1997-08-06 富士電機株式会社 静電容量式差圧検出器
DE19648424C1 (de) * 1996-11-22 1998-06-25 Siemens Ag Mikromechanischer Sensor
EP1106982B1 (de) * 1999-12-10 2005-02-09 Endress + Hauser GmbH + Co. KG Druckmessgerät
ATE431548T1 (de) * 2000-07-26 2009-05-15 Endress & Hauser Gmbh & Co Kg Kapazitiver drucksensor

Also Published As

Publication number Publication date
WO2004057291A1 (de) 2004-07-08
DE10393943B3 (de) 2012-06-14

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase