AU2003288202A1 - Method for the vapour deposition of (a) compound(s) on a support - Google Patents

Method for the vapour deposition of (a) compound(s) on a support

Info

Publication number
AU2003288202A1
AU2003288202A1 AU2003288202A AU2003288202A AU2003288202A1 AU 2003288202 A1 AU2003288202 A1 AU 2003288202A1 AU 2003288202 A AU2003288202 A AU 2003288202A AU 2003288202 A AU2003288202 A AU 2003288202A AU 2003288202 A1 AU2003288202 A1 AU 2003288202A1
Authority
AU
Australia
Prior art keywords
compound
support
vapour deposition
vapour
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003288202A
Inventor
Joachim Rosch
Bernd Sachweh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
BASF SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BASF SE filed Critical BASF SE
Publication of AU2003288202A1 publication Critical patent/AU2003288202A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Vapour Deposition (AREA)
AU2003288202A 2002-12-04 2003-11-28 Method for the vapour deposition of (a) compound(s) on a support Abandoned AU2003288202A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002156850 DE10256850A1 (en) 2002-12-04 2002-12-04 Process and vapor deposition of compound (s) on a support
DE10256850.2 2002-12-04
PCT/EP2003/013466 WO2004050946A1 (en) 2002-12-04 2003-11-28 Method for the vapour deposition of (a) compound(s) on a support

Publications (1)

Publication Number Publication Date
AU2003288202A1 true AU2003288202A1 (en) 2004-06-23

Family

ID=32336004

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003288202A Abandoned AU2003288202A1 (en) 2002-12-04 2003-11-28 Method for the vapour deposition of (a) compound(s) on a support

Country Status (4)

Country Link
EP (1) EP1570103A1 (en)
AU (1) AU2003288202A1 (en)
DE (1) DE10256850A1 (en)
WO (1) WO2004050946A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10319742A1 (en) * 2003-04-30 2004-11-18 Basf Ag Powdered organic semiconductors and methods for vapor deposition on a carrier

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100360494B1 (en) * 1999-09-21 2002-11-13 삼성전자 주식회사 Bubbler
DE10007059A1 (en) * 2000-02-16 2001-08-23 Aixtron Ag Method and device for producing coated substrates by means of condensation coating
DE10048759A1 (en) * 2000-09-29 2002-04-11 Aixtron Gmbh Method and device for separating organic layers in particular by means of OVPD
DE10212923A1 (en) * 2002-03-22 2004-01-08 Aixtron Ag Process for coating a substrate and device for carrying out the process

Also Published As

Publication number Publication date
DE10256850A1 (en) 2004-06-24
EP1570103A1 (en) 2005-09-07
WO2004050946A1 (en) 2004-06-17

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase