AU2003285678A1 - Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lamps - Google Patents
Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lampsInfo
- Publication number
- AU2003285678A1 AU2003285678A1 AU2003285678A AU2003285678A AU2003285678A1 AU 2003285678 A1 AU2003285678 A1 AU 2003285678A1 AU 2003285678 A AU2003285678 A AU 2003285678A AU 2003285678 A AU2003285678 A AU 2003285678A AU 2003285678 A1 AU2003285678 A1 AU 2003285678A1
- Authority
- AU
- Australia
- Prior art keywords
- walled
- heat treatment
- reaction chamber
- rapid heat
- infrared lamps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0210292A FR2843629B1 (en) | 2002-08-14 | 2002-08-14 | FAST THERMAL PROCESSING DEVICE HAVING INSIDE THE REACTION CHAMBER OF COLD-WALLED HALOGEN INFRARED LAMPS |
FR02/10292 | 2002-08-14 | ||
PCT/FR2003/002492 WO2004017385A2 (en) | 2002-08-14 | 2003-08-08 | Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lamps |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003285678A1 true AU2003285678A1 (en) | 2004-03-03 |
Family
ID=30775989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003285678A Abandoned AU2003285678A1 (en) | 2002-08-14 | 2003-08-08 | Device for rapid heat treatment comprising inside the reaction chamber cold-walled halogen infrared lamps |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1573781A2 (en) |
AU (1) | AU2003285678A1 (en) |
FR (1) | FR2843629B1 (en) |
WO (1) | WO2004017385A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010008084A1 (en) * | 2010-02-15 | 2011-08-18 | Leybold Optics GmbH, 63755 | Device for thermal treatment of substrates |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1070906B (en) * | 1958-02-01 | 1959-12-10 | Hamburg Hans Beckmann | METHOD OF KEEPING FISH FRESH |
JPS5977289A (en) * | 1982-10-26 | 1984-05-02 | ウシオ電機株式会社 | Beam irradiating furnace |
US4960951A (en) * | 1989-01-30 | 1990-10-02 | E. I. Du Pont De Nemours And Company | Novel perfluoropolyethers |
US20010031229A1 (en) * | 1998-10-20 | 2001-10-18 | Spjut Reed E. | UV-enhanced, in-line, infrared phosphorous diffusion furnace |
US6310323B1 (en) * | 2000-03-24 | 2001-10-30 | Micro C Technologies, Inc. | Water cooled support for lamps and rapid thermal processing chamber |
DE10041564C2 (en) * | 2000-08-24 | 2002-06-27 | Heraeus Noblelight Gmbh | Coolable infrared radiator element |
-
2002
- 2002-08-14 FR FR0210292A patent/FR2843629B1/en not_active Expired - Fee Related
-
2003
- 2003-08-08 WO PCT/FR2003/002492 patent/WO2004017385A2/en not_active Application Discontinuation
- 2003-08-08 AU AU2003285678A patent/AU2003285678A1/en not_active Abandoned
- 2003-08-08 EP EP03756539A patent/EP1573781A2/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2004017385A2 (en) | 2004-02-26 |
EP1573781A2 (en) | 2005-09-14 |
WO2004017385A3 (en) | 2004-04-08 |
FR2843629A1 (en) | 2004-02-20 |
FR2843629B1 (en) | 2005-05-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |