AU2003272100A1 - Piezoelectric driving apparatus - Google Patents

Piezoelectric driving apparatus

Info

Publication number
AU2003272100A1
AU2003272100A1 AU2003272100A AU2003272100A AU2003272100A1 AU 2003272100 A1 AU2003272100 A1 AU 2003272100A1 AU 2003272100 A AU2003272100 A AU 2003272100A AU 2003272100 A AU2003272100 A AU 2003272100A AU 2003272100 A1 AU2003272100 A1 AU 2003272100A1
Authority
AU
Australia
Prior art keywords
driving apparatus
piezoelectric driving
piezoelectric
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003272100A
Other versions
AU2003272100A8 (en
Inventor
Junichi Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of AU2003272100A8 publication Critical patent/AU2003272100A8/en
Publication of AU2003272100A1 publication Critical patent/AU2003272100A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
AU2003272100A 2002-10-18 2003-10-17 Piezoelectric driving apparatus Abandoned AU2003272100A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPNO.2002-304558 2002-10-18
JP2002304558A JP2004140946A (en) 2002-10-18 2002-10-18 Actuator
PCT/JP2003/013298 WO2004036727A2 (en) 2002-10-18 2003-10-17 Piezoelectric driving apparatus

Publications (2)

Publication Number Publication Date
AU2003272100A8 AU2003272100A8 (en) 2004-05-04
AU2003272100A1 true AU2003272100A1 (en) 2004-05-04

Family

ID=32105121

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003272100A Abandoned AU2003272100A1 (en) 2002-10-18 2003-10-17 Piezoelectric driving apparatus

Country Status (3)

Country Link
JP (1) JP2004140946A (en)
AU (1) AU2003272100A1 (en)
WO (1) WO2004036727A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4649263B2 (en) * 2005-04-22 2011-03-09 キヤノン株式会社 Optical equipment
GB2425882A (en) * 2005-04-29 2006-11-08 Univ Northumbria Newcastle Positioning apparatus
JP5620065B2 (en) * 2009-03-26 2014-11-05 株式会社日本総合研究所 External force direction detection system
JP2012178947A (en) 2011-02-28 2012-09-13 Ngk Insulators Ltd Piezoelectric actuator and piezoelectric actuator array
CN106026763B (en) * 2016-05-17 2017-05-17 西安交通大学 Piezoelectric ceramic drive three-freedom-degree angle adjusting device and method
FR3068751B1 (en) * 2017-07-06 2019-08-02 Universite Pierre Et Marie Curie TRANSMISSION MECHANISM WITH VARIABLE TRANSLATION RATIO
CN111338037A (en) * 2020-04-10 2020-06-26 季华实验室 Optical fiber coupling adjusting device and adjusting method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0424609A1 (en) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelectric actuator
JPH06204107A (en) * 1992-12-25 1994-07-22 Canon Inc Positioning stage apparatus
DE19715226A1 (en) * 1997-04-11 1998-10-15 Univ Schiller Jena Precision micro=positioning method using piezoelectric setting elements
US6457864B1 (en) * 1998-05-14 2002-10-01 Massachusetts Institute Of Technology Omni-directional high precision friction drive positioning stage
DE19859024A1 (en) * 1998-12-21 2000-06-29 Bosch Gmbh Robert Drive device has pressure element different from driven part arranged on side of piezo-element facing driven part to bias piezo-element, pressure element on other side, and clamp element

Also Published As

Publication number Publication date
WO2004036727A2 (en) 2004-04-29
AU2003272100A8 (en) 2004-05-04
WO2004036727A3 (en) 2004-10-28
JP2004140946A (en) 2004-05-13

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase