AU2003261980A1 - Thin sheet production apparatus and thin sheet production method - Google Patents

Thin sheet production apparatus and thin sheet production method

Info

Publication number
AU2003261980A1
AU2003261980A1 AU2003261980A AU2003261980A AU2003261980A1 AU 2003261980 A1 AU2003261980 A1 AU 2003261980A1 AU 2003261980 A AU2003261980 A AU 2003261980A AU 2003261980 A AU2003261980 A AU 2003261980A AU 2003261980 A1 AU2003261980 A1 AU 2003261980A1
Authority
AU
Australia
Prior art keywords
thin sheet
sheet production
production method
production apparatus
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003261980A
Inventor
Hirozumi Gokaku
Shuji Goma
Yasunobu Nishitani
Kozaburo Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of AU2003261980A1 publication Critical patent/AU2003261980A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
AU2003261980A 2002-09-10 2003-09-05 Thin sheet production apparatus and thin sheet production method Abandoned AU2003261980A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002263654 2002-09-10
JP2002-263654 2002-09-10
PCT/JP2003/011399 WO2004025000A1 (en) 2002-09-10 2003-09-05 Thin sheet production apparatus and thin sheet production method

Publications (1)

Publication Number Publication Date
AU2003261980A1 true AU2003261980A1 (en) 2004-04-30

Family

ID=31986457

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003261980A Abandoned AU2003261980A1 (en) 2002-09-10 2003-09-05 Thin sheet production apparatus and thin sheet production method

Country Status (4)

Country Link
JP (1) JP4105163B2 (en)
AU (1) AU2003261980A1 (en)
TW (1) TWI239107B (en)
WO (1) WO2004025000A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009054769A (en) * 2007-08-27 2009-03-12 Sharp Corp Sheet manufacturing apparatus and sheet manufacturing method
WO2014001886A1 (en) 2012-06-27 2014-01-03 Rgs Development B.V. Film of polycrystalline semiconductor material, method of making same and orienting/undercooling molds therefor, and electronic device
WO2014001888A1 (en) 2012-06-27 2014-01-03 Rgs Development B.V. Film of polycrystalline semiconductor material, method of making same and undercooling molds therefor, and electronic device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3656821B2 (en) * 1999-09-14 2005-06-08 シャープ株式会社 Polycrystalline silicon sheet manufacturing apparatus and manufacturing method
JP4121697B2 (en) * 1999-12-27 2008-07-23 シャープ株式会社 Crystal sheet manufacturing method and manufacturing apparatus thereof
JP3788907B2 (en) * 2000-12-05 2006-06-21 シャープ株式会社 Crystal sheet manufacturing apparatus and crystal sheet manufacturing method
JP3973852B2 (en) * 2001-03-26 2007-09-12 神鋼電機株式会社 Semiconductor substrate manufacturing equipment
JP4039057B2 (en) * 2001-12-27 2008-01-30 神鋼電機株式会社 Deposition substrate
JP4061913B2 (en) * 2002-01-31 2008-03-19 神鋼電機株式会社 Precipitation plate manufacturing equipment

Also Published As

Publication number Publication date
TWI239107B (en) 2005-09-01
JP4105163B2 (en) 2008-06-25
JPWO2004025000A1 (en) 2006-01-12
WO2004025000A1 (en) 2004-03-25
TW200415801A (en) 2004-08-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase