AU2003260000A1 - Barrier coatings produced by atmospheric glow discharge - Google Patents

Barrier coatings produced by atmospheric glow discharge

Info

Publication number
AU2003260000A1
AU2003260000A1 AU2003260000A AU2003260000A AU2003260000A1 AU 2003260000 A1 AU2003260000 A1 AU 2003260000A1 AU 2003260000 A AU2003260000 A AU 2003260000A AU 2003260000 A AU2003260000 A AU 2003260000A AU 2003260000 A1 AU2003260000 A1 AU 2003260000A1
Authority
AU
Australia
Prior art keywords
glow discharge
barrier coatings
coatings produced
atmospheric glow
atmospheric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003260000A
Other languages
English (en)
Other versions
AU2003260000A8 (en
Inventor
Richard E. Ellwanger
Michael G. Mikhael
Angelo Yializis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sigma Technologies International Inc
Original Assignee
Sigma Technologies International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/228,358 external-priority patent/US6774018B2/en
Application filed by Sigma Technologies International Inc filed Critical Sigma Technologies International Inc
Publication of AU2003260000A8 publication Critical patent/AU2003260000A8/xx
Publication of AU2003260000A1 publication Critical patent/AU2003260000A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AU2003260000A 2002-08-26 2003-08-22 Barrier coatings produced by atmospheric glow discharge Abandoned AU2003260000A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/228,358 2002-08-26
US10/228,358 US6774018B2 (en) 1999-02-01 2002-08-26 Barrier coatings produced by atmospheric glow discharge
PCT/US2003/026363 WO2004019381A2 (en) 1999-02-01 2003-08-22 Barrier coatings produced by atmospheric glow discharge

Publications (2)

Publication Number Publication Date
AU2003260000A8 AU2003260000A8 (en) 2004-03-11
AU2003260000A1 true AU2003260000A1 (en) 2004-03-11

Family

ID=34272158

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003260000A Abandoned AU2003260000A1 (en) 2002-08-26 2003-08-22 Barrier coatings produced by atmospheric glow discharge

Country Status (4)

Country Link
EP (1) EP1540714A4 (ja)
JP (1) JP2005536635A (ja)
CN (1) CN100380590C (ja)
AU (1) AU2003260000A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011522381A (ja) * 2008-05-30 2011-07-28 コロラド ステート ユニバーシティ リサーチ ファンデーション プラズマに基づく化学源装置およびその使用方法
US8206794B2 (en) * 2009-05-04 2012-06-26 The Boeing Company System and method for applying abrasion-resistant coatings
CN102076185B (zh) * 2009-11-20 2014-12-10 深圳富泰宏精密工业有限公司 壳体的制作方法及由该方法制得的壳体
CN102344140A (zh) * 2010-07-29 2012-02-08 比亚迪股份有限公司 一种晶体硅沉积方法
CN102747327B (zh) * 2011-04-21 2014-06-11 馗鼎奈米科技股份有限公司 抗污薄膜的常压蒸镀方法、常压蒸镀装置与制作设备
JP6450932B2 (ja) * 2014-05-13 2019-01-16 パナソニックＩｐマネジメント株式会社 プラズマ処理装置及び方法
JP7436973B2 (ja) * 2019-10-11 2024-02-22 学校法人東京電機大学 非晶質炭素含有シート、非晶質炭素含有シート製品、および通気性シートに抗菌性または抗ウイルス性を付与する方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3522817A1 (de) * 1985-06-26 1987-01-02 Gruenwald Heinrich Dipl Chem Verfahren zur herstellung bewuchsabweisender sowie frasshemmender schutzschichten
US5224441A (en) * 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5508368A (en) * 1994-03-03 1996-04-16 Diamonex, Incorporated Ion beam process for deposition of highly abrasion-resistant coatings
US5980604A (en) * 1996-06-13 1999-11-09 The Regents Of The University Of California Spray formed multifunctional materials
US5789145A (en) * 1996-07-23 1998-08-04 Eastman Kodak Company Atmospheric pressure glow discharge treatment of base material for photographic applications
EP2233605B1 (en) * 2000-12-12 2012-09-26 Konica Corporation Optical film comprising an anti-reflection layer

Also Published As

Publication number Publication date
AU2003260000A8 (en) 2004-03-11
CN100380590C (zh) 2008-04-09
CN1679142A (zh) 2005-10-05
EP1540714A4 (en) 2007-11-14
EP1540714A2 (en) 2005-06-15
JP2005536635A (ja) 2005-12-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase