AU2003250121A1 - Determining the position of an object using a three-dimensional interference grid - Google Patents

Determining the position of an object using a three-dimensional interference grid

Info

Publication number
AU2003250121A1
AU2003250121A1 AU2003250121A AU2003250121A AU2003250121A1 AU 2003250121 A1 AU2003250121 A1 AU 2003250121A1 AU 2003250121 A AU2003250121 A AU 2003250121A AU 2003250121 A AU2003250121 A AU 2003250121A AU 2003250121 A1 AU2003250121 A1 AU 2003250121A1
Authority
AU
Australia
Prior art keywords
determining
dimensional interference
interference grid
grid
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003250121A
Inventor
Ludwig Josef Balk
Volker K. S. Feige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bergische Universitaet Wuppertal
Original Assignee
Bergische Universitaet Wuppertal
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bergische Universitaet Wuppertal filed Critical Bergische Universitaet Wuppertal
Publication of AU2003250121A1 publication Critical patent/AU2003250121A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU2003250121A 2002-09-13 2003-07-19 Determining the position of an object using a three-dimensional interference grid Abandoned AU2003250121A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002142749 DE10242749A1 (en) 2002-09-13 2002-09-13 3D interferometric position measurement system, e.g. for use in locating the probe of a raster scanning microscope, whereby a measurement area is created by the interference of at least three coherent waves
DE10242749.6 2002-09-13
PCT/EP2003/007907 WO2004033989A1 (en) 2002-09-13 2003-07-19 Determining the position of an object using a three-dimensional interference grid

Publications (1)

Publication Number Publication Date
AU2003250121A1 true AU2003250121A1 (en) 2004-05-04

Family

ID=31983928

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003250121A Abandoned AU2003250121A1 (en) 2002-09-13 2003-07-19 Determining the position of an object using a three-dimensional interference grid

Country Status (3)

Country Link
AU (1) AU2003250121A1 (en)
DE (1) DE10242749A1 (en)
WO (1) WO2004033989A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060262876A1 (en) * 2004-08-26 2006-11-23 Ladue Christoph K Wave matrix mechanics method & apparatus
US8456650B2 (en) 2008-09-09 2013-06-04 Cornell University Optical grid for high precision and high resolution method of wafer-scale nanofabrication
US8991062B2 (en) 2011-12-15 2015-03-31 Atkinson Audio Inc. Locating and relocating device
WO2014095209A1 (en) * 2012-12-17 2014-06-26 Waterford Institute Of Technology Position detector
MD4295C1 (en) * 2013-04-12 2015-02-28 Государственный Университет Молд0 Method for remote measuremnt of the size of petroleum product spots on water surface

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3930734A (en) * 1974-04-26 1976-01-06 Atlantic Research Corporation Process and apparatus for sensing magnitude and direction of lateral displacement
US4696574A (en) * 1984-06-21 1987-09-29 General Electric Company Precision remote location of a movable point employing light interference fringes
GB2218505B (en) * 1988-05-10 1992-02-19 Gen Electric Co Plc Optical position measurement
RU2069839C1 (en) * 1991-05-07 1996-11-27 Михайлин Юрий Сергеевич Device determining lateral displacements
JPH0642953A (en) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd Interatomic force microscope
JP3302139B2 (en) * 1993-10-27 2002-07-15 キヤノン株式会社 Measuring device for straightness of moving object

Also Published As

Publication number Publication date
WO2004033989A1 (en) 2004-04-22
DE10242749A1 (en) 2004-04-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase