AU2003238061A1 - Method of forming a thin film using atomic layer deposition(ald) - Google Patents

Method of forming a thin film using atomic layer deposition(ald)

Info

Publication number
AU2003238061A1
AU2003238061A1 AU2003238061A AU2003238061A AU2003238061A1 AU 2003238061 A1 AU2003238061 A1 AU 2003238061A1 AU 2003238061 A AU2003238061 A AU 2003238061A AU 2003238061 A AU2003238061 A AU 2003238061A AU 2003238061 A1 AU2003238061 A1 AU 2003238061A1
Authority
AU
Australia
Prior art keywords
ald
forming
thin film
atomic layer
layer deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003238061A
Inventor
Jang-Ho Bae
Young-Hoon Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IPS Ltd
Original Assignee
IPS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IPS Ltd filed Critical IPS Ltd
Publication of AU2003238061A1 publication Critical patent/AU2003238061A1/en
Abandoned legal-status Critical Current

Links

AU2003238061A 2002-01-23 2003-01-16 Method of forming a thin film using atomic layer deposition(ald) Abandoned AU2003238061A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2002-003863 2002-01-23

Publications (1)

Publication Number Publication Date
AU2003238061A1 true AU2003238061A1 (en) 2003-09-02

Family

ID=

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