AU2003217463A1 - System for vacuum metallization of objects treated in batches - Google Patents

System for vacuum metallization of objects treated in batches

Info

Publication number
AU2003217463A1
AU2003217463A1 AU2003217463A AU2003217463A AU2003217463A1 AU 2003217463 A1 AU2003217463 A1 AU 2003217463A1 AU 2003217463 A AU2003217463 A AU 2003217463A AU 2003217463 A AU2003217463 A AU 2003217463A AU 2003217463 A1 AU2003217463 A1 AU 2003217463A1
Authority
AU
Australia
Prior art keywords
batches
vacuum metallization
objects treated
treated
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003217463A
Inventor
Mario Ceni
Stefano Fanfani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GALILEO VACUUM SYSTEM Srl
Original Assignee
GALILEO VACUUM SYSTEM Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GALILEO VACUUM SYSTEM Srl filed Critical GALILEO VACUUM SYSTEM Srl
Publication of AU2003217463A1 publication Critical patent/AU2003217463A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
AU2003217463A 2002-03-08 2003-03-04 System for vacuum metallization of objects treated in batches Abandoned AU2003217463A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITFI20020042 ITFI20020042A1 (en) 2002-03-08 2002-03-08 PLANT FOR THE VACUUM METALLIZATION OF OBJECTS PROCESSED IN LOTS
ITFI2002A000042 2002-03-08
PCT/IT2003/000131 WO2003076684A1 (en) 2002-03-08 2003-03-04 System for vacuum metallization of objects treated in batches

Publications (1)

Publication Number Publication Date
AU2003217463A1 true AU2003217463A1 (en) 2003-09-22

Family

ID=11442315

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003217463A Abandoned AU2003217463A1 (en) 2002-03-08 2003-03-04 System for vacuum metallization of objects treated in batches

Country Status (4)

Country Link
EP (1) EP1485517A1 (en)
AU (1) AU2003217463A1 (en)
IT (1) ITFI20020042A1 (en)
WO (1) WO2003076684A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1947211A1 (en) * 2006-12-05 2008-07-23 Galileo Vacuum Systems S.p.A. Vacuum metallization device
RU2673253C2 (en) * 2017-04-20 2018-11-23 Вера Дмитриевна Мирошникова Crown substrate carrier
EP3966854A1 (en) * 2019-05-07 2022-03-16 Oerlikon Surface Solutions AG, Pfäffikon Movable work piece carrier device for holding work pieces to be treated
CN112195450B (en) * 2020-10-23 2022-10-18 青岛优百宇真空设备股份有限公司 Wheel hub coating equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
US4308126A (en) * 1980-09-18 1981-12-29 United Technologies Corporation Cathode sputtering apparatus
US5124013A (en) * 1988-02-08 1992-06-23 Optical Coating Laboratory, Inc. High ratio planetary drive system and method for vacuum chamber
WO1998020521A1 (en) * 1996-11-01 1998-05-14 THEVA DüNNSCHICHTTECHNIK GMBH Device for producing oxidic thin films
US6485616B1 (en) * 1999-12-29 2002-11-26 Deposition Sciences, Inc. System and method for coating substrates with improved capacity and uniformity
CN1575350A (en) * 2001-08-24 2005-02-02 纳米纳克斯公司 Method and apparatus of producing uniform isotropic stresses in a sputtered film

Also Published As

Publication number Publication date
EP1485517A1 (en) 2004-12-15
ITFI20020042A1 (en) 2002-06-06
WO2003076684A1 (en) 2003-09-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase