AU2003215496A8 - Method for the production of a bragg lattice in a semiconductor layer sequence by etching and semiconductor element - Google Patents
Method for the production of a bragg lattice in a semiconductor layer sequence by etching and semiconductor elementInfo
- Publication number
- AU2003215496A8 AU2003215496A8 AU2003215496A AU2003215496A AU2003215496A8 AU 2003215496 A8 AU2003215496 A8 AU 2003215496A8 AU 2003215496 A AU2003215496 A AU 2003215496A AU 2003215496 A AU2003215496 A AU 2003215496A AU 2003215496 A8 AU2003215496 A8 AU 2003215496A8
- Authority
- AU
- Australia
- Prior art keywords
- production
- bragg
- etching
- bragg lattice
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/0675—Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1228—DFB lasers with a complex coupled grating, e.g. gain or loss coupling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1231—Grating growth or overgrowth details
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Lasers (AREA)
- Drying Of Semiconductors (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a method for the production of a Bragg lattice in a semiconductor layer sequence having corresponding layer thicknesses and refraction indices by means of etching. The aim of the invention is to develop a method and a component enabling the production of Bragg lattices with pulse duty factors which are significantly different from ½ by means of holographic exposure, whereby the pulse duty factor of the Bragg lattice can be precisely adjusted and controlled without structuring the masking layer for the same duty factor and without using or modifying electron beam exposure. This is achieved by selecting the layer thicknesses and refraction indices of a semiconductor sequence into which the Bragg lattice is etched in such a way that a defined pulse duty factor and a defined difference in the effective index of refraction can be obtained.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10200360.2 | 2002-01-08 | ||
DE10200360A DE10200360B4 (en) | 2002-01-08 | 2002-01-08 | Method for producing a Bragg grating in a semiconductor layer sequence by means of etching and semiconductor component |
PCT/DE2003/000072 WO2003058685A2 (en) | 2002-01-08 | 2003-01-08 | Method for the production of a bragg lattice in a semiconductor layer sequence by etching and semiconductor element |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003215496A8 true AU2003215496A8 (en) | 2003-07-24 |
AU2003215496A1 AU2003215496A1 (en) | 2003-07-24 |
Family
ID=7711631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003215496A Abandoned AU2003215496A1 (en) | 2002-01-08 | 2003-01-08 | Method for the production of a bragg lattice in a semiconductor layer sequence by etching and semiconductor element |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1464098B1 (en) |
AT (1) | ATE338363T1 (en) |
AU (1) | AU2003215496A1 (en) |
DE (2) | DE10200360B4 (en) |
WO (1) | WO2003058685A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004111709A (en) | 2002-09-19 | 2004-04-08 | Mitsubishi Electric Corp | Semiconductor laser |
CN111490450A (en) * | 2020-04-24 | 2020-08-04 | 江苏华兴激光科技有限公司 | 808nm laser epitaxial wafer and preparation method thereof |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023198A (en) * | 1990-02-28 | 1991-06-11 | At&T Bell Laboratories | Method for fabricating self-stabilized semiconductor gratings |
WO1992007401A1 (en) * | 1990-10-19 | 1992-04-30 | Optical Measurement Technology Development Co., Ltd. | Distributed feedback semiconductor laser |
DE4322164A1 (en) * | 1993-07-03 | 1995-01-12 | Ant Nachrichtentech | Optoelectronic component with feedback grating, with axially quasi-continuous and almost arbitrarily variable grating coupling coefficients, with quasi-continuously axially distributable refractive index variation, and with axially almost arbitrarily distributable and variable phase shift |
EP1265326B1 (en) * | 2000-03-13 | 2009-05-13 | Sharp Kabushiki Kaisha | Gain-coupled distributed feedback semiconductor laser device and production method therefor |
-
2002
- 2002-01-08 DE DE10200360A patent/DE10200360B4/en not_active Expired - Lifetime
-
2003
- 2003-01-08 AT AT03729213T patent/ATE338363T1/en not_active IP Right Cessation
- 2003-01-08 AU AU2003215496A patent/AU2003215496A1/en not_active Abandoned
- 2003-01-08 EP EP03729213A patent/EP1464098B1/en not_active Expired - Lifetime
- 2003-01-08 WO PCT/DE2003/000072 patent/WO2003058685A2/en active IP Right Grant
- 2003-01-08 DE DE50304846T patent/DE50304846D1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1464098A2 (en) | 2004-10-06 |
DE10200360B4 (en) | 2004-01-08 |
AU2003215496A1 (en) | 2003-07-24 |
WO2003058685A3 (en) | 2003-11-27 |
ATE338363T1 (en) | 2006-09-15 |
DE50304846D1 (en) | 2006-10-12 |
DE10200360A1 (en) | 2003-07-31 |
EP1464098B1 (en) | 2006-08-30 |
WO2003058685A2 (en) | 2003-07-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK1846253T3 (en) | Process for producing a multilayer body as well as a multilayer body thus produced | |
TW200707548A (en) | Manufacturing method of semiconductor device | |
ATE504082T1 (en) | METHOD FOR PRODUCING A HETEROEPITACTIC MICROSTRUCTURE | |
ATE524577T1 (en) | METHOD FOR PRODUCING AN EPITACTICALLY GROWN LAYER | |
MY181614A (en) | Sic wafer producing method | |
TW200604609A (en) | Method for manufacturing a master, master, method for manufacturing optical elements and optical element | |
ATE527579T1 (en) | SYSTEMS AND METHODS FOR PRODUCING MICROSTRUCTURES BY IMAGING A RADIATION-SENSITIVE LAYER LAYED BETWEEN OUTER LAYERS AND MICROSTRUCTURES PRODUCED THEREFROM | |
SG10201709401QA (en) | SiC WAFER PRODUCING METHOD | |
WO2004015741A3 (en) | Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma | |
TW200600963A (en) | Gray scale mask and method of manufacturing the same | |
TW200802704A (en) | Method of fabricating a precision buried resistor | |
BRPI0411908A (en) | optical security element and system for viewing hidden information items | |
ATE303662T1 (en) | METALLIC SURFACE OF A BODY, METHOD FOR PRODUCING A STRUCTURED METALLIC SURFACE OF A BODY AND USE THEREOF | |
DE602004008969D1 (en) | Method for producing an electroluminescent device | |
JP2022116133A (en) | Method for processing, especially, separation of substrate using pulse laser | |
AU2003215496A8 (en) | Method for the production of a bragg lattice in a semiconductor layer sequence by etching and semiconductor element | |
FR3075773B1 (en) | PROCESS FOR PRODUCING SEMICONDUCTOR DEVICES AND CUTTING PATHS | |
JP2005505015A (en) | Optical coupling element | |
KR20050083421A (en) | Manufacturing method of shadow mask for organic electroluminicent device | |
DE50301688D1 (en) | METHOD FOR PRODUCING A UNIT WITH SPATIAL SURFACE STRUCTURING AND USE OF THIS METHOD | |
ATE447420T1 (en) | HYDROGEL-CONTAINING COMPOSITE MATERIAL PRODUCED BY ELECTRICALLY TRIGGERED PRECIPITATION OF A SOLID PHASE | |
ATE528691T1 (en) | METHOD FOR PRODUCING RESIST PROFILES | |
DK1513684T3 (en) | Process for manufacturing composite elements | |
JP2017063099A (en) | Method for manufacturing substrate including uneven structure, and method for manufacturing semiconductor light-emitting device | |
TWI415292B (en) | Light emitting element having a nanometer stripe structure and a method of manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |