AU2003205668A1 - Mirror facet for a segmented mirror - Google Patents

Mirror facet for a segmented mirror

Info

Publication number
AU2003205668A1
AU2003205668A1 AU2003205668A AU2003205668A AU2003205668A1 AU 2003205668 A1 AU2003205668 A1 AU 2003205668A1 AU 2003205668 A AU2003205668 A AU 2003205668A AU 2003205668 A AU2003205668 A AU 2003205668A AU 2003205668 A1 AU2003205668 A1 AU 2003205668A1
Authority
AU
Australia
Prior art keywords
mirror
segmented
facet
mirror facet
segmented mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003205668A
Inventor
Frank Melzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of AU2003205668A1 publication Critical patent/AU2003205668A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
AU2003205668A 2002-02-02 2003-01-24 Mirror facet for a segmented mirror Abandoned AU2003205668A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10204249.7 2002-02-02
DE2002104249 DE10204249A1 (en) 2002-02-02 2002-02-02 Mirror facet for a faceted mirror
PCT/EP2003/000716 WO2003067288A1 (en) 2002-02-02 2003-01-24 Mirror facet for a segmented mirror

Publications (1)

Publication Number Publication Date
AU2003205668A1 true AU2003205668A1 (en) 2003-09-02

Family

ID=27588271

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003205668A Abandoned AU2003205668A1 (en) 2002-02-02 2003-01-24 Mirror facet for a segmented mirror

Country Status (3)

Country Link
AU (1) AU2003205668A1 (en)
DE (1) DE10204249A1 (en)
WO (1) WO2003067288A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006006721A1 (en) * 2006-02-13 2007-08-23 Deutsche Thomsson Ohg Adjustable bracket for a plate
DE102007008448A1 (en) * 2007-02-19 2008-08-21 Carl Zeiss Smt Ag Method of producing mirror facets for a facet mirror
CN101669071B (en) 2007-04-25 2012-03-21 卡尔蔡司Smt有限责任公司 Illumination system for illuminating a mask in a microlithographic exposure apparatus
DE102012209412A1 (en) 2012-06-04 2013-12-05 Carl Zeiss Smt Gmbh Optical method for measuring angular position of facet of facet mirror for extreme UV (EUV) lithography, involves detecting actual angular positions of facets in preset spectrum of angular positions with respect to reference axis
DE102013001417B4 (en) 2013-01-24 2016-02-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflective optical element for a dynamic deflection of a laser beam and a method for its production
DE102013204305A1 (en) * 2013-03-13 2014-09-18 Carl Zeiss Smt Gmbh Arrangement for the actuation of at least one element in an optical system
DE102013223017A1 (en) * 2013-11-12 2014-11-20 Carl Zeiss Smt Gmbh Optical module
WO2016087565A1 (en) * 2014-12-05 2016-06-09 Carl Zeiss Smt Gmbh Adjusting system component, module, mirror arrangement and projection exposure installation for microlithography

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB271372A (en) * 1927-01-31 1927-05-26 Weightograph Company Adjustable reflector frame
US4023891A (en) * 1975-12-15 1977-05-17 Gte Sylvania Incorporated Adjustable mirror mount assembly
US4925288A (en) * 1989-05-23 1990-05-15 Coherent, Inc. Adjustable mirror mount
US5109349A (en) * 1990-01-23 1992-04-28 Kaman Aerospace Corporation Actively controlled segmented mirror
US6042240A (en) * 1997-02-20 2000-03-28 Strieber; Louis Charles Adjustable three dimensional focal length tracking reflector array
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
DE19729074A1 (en) * 1997-07-08 1999-03-11 Tilo Ritz Light reflector with reflector module of reflector elements

Also Published As

Publication number Publication date
DE10204249A1 (en) 2003-08-14
WO2003067288A1 (en) 2003-08-14

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase