AU2002367999A1 - Process for cleaning and repassivating semiconductor equipment parts - Google Patents

Process for cleaning and repassivating semiconductor equipment parts

Info

Publication number
AU2002367999A1
AU2002367999A1 AU2002367999A AU2002367999A AU2002367999A1 AU 2002367999 A1 AU2002367999 A1 AU 2002367999A1 AU 2002367999 A AU2002367999 A AU 2002367999A AU 2002367999 A AU2002367999 A AU 2002367999A AU 2002367999 A1 AU2002367999 A1 AU 2002367999A1
Authority
AU
Australia
Prior art keywords
repassivating
cleaning
semiconductor equipment
equipment parts
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002367999A
Inventor
Henry C. Peebles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Priority claimed from PCT/US2002/016670 external-priority patent/WO2003101762A1/en
Publication of AU2002367999A1 publication Critical patent/AU2002367999A1/en
Abandoned legal-status Critical Current

Links

AU2002367999A 2002-05-28 2002-05-28 Process for cleaning and repassivating semiconductor equipment parts Abandoned AU2002367999A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/016670 WO2003101762A1 (en) 2002-05-28 2002-05-28 Process for cleaning and repassivating semiconductor equipment parts

Publications (1)

Publication Number Publication Date
AU2002367999A1 true AU2002367999A1 (en) 2003-12-19

Family

ID=34271563

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002367999A Abandoned AU2002367999A1 (en) 2002-05-28 2002-05-28 Process for cleaning and repassivating semiconductor equipment parts

Country Status (1)

Country Link
AU (1) AU2002367999A1 (en)

Similar Documents

Publication Publication Date Title
AU2003269499A1 (en) Semiconductor apparatus and fabrication method of the same
AU2003219942A1 (en) Composition and process for well cleaning
AU2003221741A1 (en) Apparatus and method for article cleaning
AU2003253907A1 (en) Loadport apparatus and method for use thereof
AU2002315510A1 (en) Semiconductor process residue removal composition and process
IL174877A0 (en) Cleaning agent for substrate and cleaning method
AU2003266565A1 (en) Substrate processing apparatus
AU2003266564A1 (en) Substrate processing apparatus
AU2003259203A1 (en) Substrate processing apparatus
AU2003237608A1 (en) Cleaning method
PL372424A1 (en) Cleaning apparatus and method for using the same
AU2003244018A1 (en) Method of cleaning substrate-processing device and substrate-processing device
AU2003207218A1 (en) Semiconductor manufacturing method and semiconductor manufacturing apparatus
AU2003266556A1 (en) Stocker apparatus
AU2002348636A1 (en) Method for ashing
AU2003235748A1 (en) Method for cleaning an article
AU2003271113A1 (en) Ultrsonic washing equipment and ultrasonic washing method
AU2003218985A1 (en) Device and method for washing container-gripping elements
AU2002352360A1 (en) Cleaning process and apparatus
AU2003264920A1 (en) Method and apparatus for cleaning articles
AU2002366920A1 (en) Cleaning gas composition for semiconductor production equipment and cleaning method using the gas
AU2003224951A1 (en) Method and apparatus for efficient semiconductor process evaluation
AU2002357256A1 (en) Semiconductor apparatus
TW558058U (en) Wafer carrying apparatus
AU2003213394A1 (en) Polishing equipment, and method of manufacturing semiconductor device using the equipment

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase