Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002367999A
Inventor
Henry C. Peebles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials IncfiledCriticalAdvanced Technology Materials Inc
Priority claimed from PCT/US2002/016670external-prioritypatent/WO2003101762A1/en
Publication of AU2002367999A1publicationCriticalpatent/AU2002367999A1/en