AU2002361053A1 - Method for optically detecting local defects in a periodic structure - Google Patents

Method for optically detecting local defects in a periodic structure

Info

Publication number
AU2002361053A1
AU2002361053A1 AU2002361053A AU2002361053A AU2002361053A1 AU 2002361053 A1 AU2002361053 A1 AU 2002361053A1 AU 2002361053 A AU2002361053 A AU 2002361053A AU 2002361053 A AU2002361053 A AU 2002361053A AU 2002361053 A1 AU2002361053 A1 AU 2002361053A1
Authority
AU
Australia
Prior art keywords
periodic structure
optically detecting
local defects
detecting local
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002361053A
Inventor
Wolfram Laux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Basler AG
Original Assignee
Basler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basler AG filed Critical Basler AG
Publication of AU2002361053A1 publication Critical patent/AU2002361053A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/40—Analysis of texture
    • G06T7/49—Analysis of texture based on structural texture description, e.g. using primitives or placement rules
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Computer Hardware Design (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
AU2002361053A 2001-12-15 2002-12-11 Method for optically detecting local defects in a periodic structure Abandoned AU2002361053A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10161737.2 2001-12-15
DE10161737A DE10161737C1 (en) 2001-12-15 2001-12-15 Examination of periodic structure e.g. LCD screen by optical scanning, employs comparative method to establish difference image revealing defects
PCT/EP2002/014092 WO2003052674A1 (en) 2001-12-15 2002-12-11 Method for optically detecting local defects in a periodic structure

Publications (1)

Publication Number Publication Date
AU2002361053A1 true AU2002361053A1 (en) 2003-06-30

Family

ID=7709390

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002361053A Abandoned AU2002361053A1 (en) 2001-12-15 2002-12-11 Method for optically detecting local defects in a periodic structure

Country Status (4)

Country Link
AU (1) AU2002361053A1 (en)
DE (1) DE10161737C1 (en)
TW (1) TW200301355A (en)
WO (1) WO2003052674A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006000946B4 (en) * 2006-01-07 2007-11-15 Isra Vision Systems Ag Method and system for inspecting a periodic structure
DE102012101242A1 (en) * 2012-02-16 2013-08-22 Hseb Dresden Gmbh inspection procedures
CN103630547B (en) * 2013-11-26 2016-02-03 明基材料有限公司 There is flaw detection method and the pick-up unit thereof of the optical thin film of periodic structure
RU2688239C1 (en) * 2018-08-07 2019-05-21 Акционерное общество "Гознак" (АО "Гознак") Method for video control quality of repetition of quasi-identical objects based on high-speed algorithms for comparing flat periodic structures of a rolled sheet

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4969198A (en) * 1986-04-17 1990-11-06 International Business Machines Corporation System for automatic inspection of periodic patterns
DE3885747T2 (en) * 1988-09-17 1994-06-09 Sigmax Kk Pattern recognition device.
US5513275A (en) * 1993-01-12 1996-04-30 Board Of Trustees Of The Leland Stanford Junior University Automated direct patterned wafer inspection
KR100235476B1 (en) * 1993-10-27 1999-12-15 구와하라아키라 Method and apparatus of inspecting surface irregularity of an object
US6134022A (en) * 1995-07-14 2000-10-17 Kabushiki Kaisha Toshiba Color image printing system capable of correcting density deviation on image and system for detecting color deviation on image
DE19834718C2 (en) * 1998-07-31 2003-06-12 Fraunhofer Ges Forschung Digital image processing for a quality control system

Also Published As

Publication number Publication date
WO2003052674A1 (en) 2003-06-26
DE10161737C1 (en) 2003-06-12
TW200301355A (en) 2003-07-01

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase